About: Superhard Si-B-C-N films prepared by reactive magnetron sputtering

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Superhard Si-B-C-N films prepared by reactive magnetron sputtering Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The new quaternary Si-B-C-N materials attract great interest due to their potential applications in microelectronics and coating technologies. These materials can possess a useful set of properties, such as very highhardness, extremely high temperature resistance chemical inertness , a wide optical transparency window and wide band gap characteristics. Various deposition techniques, mostly based on chemical vapour deposition at elevated temperatures or a polymer precursor pyrolysis, were used to prep aramorphous or crystalline Si-B-C-N ceramics. In our experiment we have used the reactive magnetron sputtering, one of the most versatile techniques compatible with semiconductor technologies. Its further important advantages are an easy up-scalingrad l owedeposition temperatures, which are often desirable for practical applications. The new quaternary Si-B-C-N materials attract great interest due to their potential applications in microelectronics and coating technologies. These materials can possess a useful set of properties, such as very highhardness, extremely high temperature resistance chemical inertness , a wide optical transparency window and wide band gap characteristics. Various deposition techniques, mostly based on chemical vapour deposition at elevated temperatures or a polymer precursor pyrolysis, were used to prep aramorphous or crystalline Si-B-C-N ceramics. In our experiment we have used the reactive magnetron sputtering, one of the most versatile techniques compatible with semiconductor technologies. Its further important advantages are an easy up-scalingrad l owedeposition temperatures, which are often desirable for practical applications. (en)
Title	Superhard Si-B-C-N films prepared by reactive magnetron sputtering Superhard Si-B-C-N films prepared by reactive magnetron sputtering (en)
skos:prefLabel	Superhard Si-B-C-N films prepared by reactive magnetron sputtering Superhard Si-B-C-N films prepared by reactive magnetron sputtering (en)
skos:notation	RIV/49777513:23520/03:00000072!RIV/2004/MSM/235204/N
http://linked.open.../vavai/riv/strany	130-131
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM 235200002)
http://linked.open...vai/riv/dodaniDat	2004
http://linked.open...aciTvurceVysledku	Soukup, Zbyněk Čížek, Jiří Vlček, Jaroslav Potocký, Štěpán
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Fakulta aplikovaných věd
http://linked.open...dnocenehoVysledku	629738
http://linked.open...ai/riv/idVysledku	RIV/49777513:23520/03:00000072
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	magnetron sputtering; thin films; superhardness (en)
http://linked.open.../riv/klicoveSlovo	magnetron sputtering thin films superhardness
http://linked.open...ontrolniKodProRIV	[E8E14E0160EB]
http://linked.open...v/mistoKonaniAkce	Liptovský Mikuláš
http://linked.open...i/riv/mistoVydani	Liptovský Mikuláš
http://linked.open...i/riv/nazevZdroje	Proceedings of the XIVth Symposium on Application of Plasma Processes
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...UplatneniVysledku	2003
http://linked.open...iv/tvurceVysledku	Kormunda, Martin Vlček, Jaroslav Peřina, Vratislav Potocký, Štěpán Čížek, Jiří Soukup, Zbyněk
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2003-01-13 (xsd:date)
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20235200002
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Military Academy
https://schema.org/isbn	80-8040-195-0
http://localhost/t...ganizacniJednotka	23520

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software