About: Characterization of the Positioning Accuracy and Precision of MEMS Die Servoing Using Model-based Visual Tracking     Goto   Sponge   NotDistinct   Permalink

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Description
  • This work deals with an automated micro-assembly of MEMS die holders using a 3D visual servoing approach. Visual positioning which was used is based on eye-to-hand tracking principle. The 3D poses of the MEMS are supplied in a real-time by a 3D (CAD) model-based tracking algorithm. Having executed the visual servoing the accuracy and repeatability of this method was examined. The micro-assembly process was performed and the accuracy calculated according to ISO 9283. The achieved accuracy was 0.345 µm and repeatability was 4.3 µm. The rotation accuracy was less than 0.13°.
  • This work deals with an automated micro-assembly of MEMS die holders using a 3D visual servoing approach. Visual positioning which was used is based on eye-to-hand tracking principle. The 3D poses of the MEMS are supplied in a real-time by a 3D (CAD) model-based tracking algorithm. Having executed the visual servoing the accuracy and repeatability of this method was examined. The micro-assembly process was performed and the accuracy calculated according to ISO 9283. The achieved accuracy was 0.345 µm and repeatability was 4.3 µm. The rotation accuracy was less than 0.13°. (en)
Title
  • Characterization of the Positioning Accuracy and Precision of MEMS Die Servoing Using Model-based Visual Tracking
  • Characterization of the Positioning Accuracy and Precision of MEMS Die Servoing Using Model-based Visual Tracking (en)
skos:prefLabel
  • Characterization of the Positioning Accuracy and Precision of MEMS Die Servoing Using Model-based Visual Tracking
  • Characterization of the Positioning Accuracy and Precision of MEMS Die Servoing Using Model-based Visual Tracking (en)
skos:notation
  • RIV/46747885:24210/14:#0006495!RIV15-MSM-24210___
http://linked.open...avai/riv/aktivita
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  • S
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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http://linked.open...iv/duvernostUdaju
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  • 6986
http://linked.open...ai/riv/idVysledku
  • RIV/46747885:24210/14:#0006495
http://linked.open...riv/jazykVysledku
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  • Microassembly; Microrobotic automation; Micro-object tracking; MEMS visual servoing (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [5D8357833056]
http://linked.open...v/mistoKonaniAkce
  • High Tatras, Slovakia
http://linked.open...i/riv/mistoVydani
  • Switzerland
http://linked.open...i/riv/nazevZdroje
  • Industrial and Service Robotics
http://linked.open...in/vavai/riv/obor
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http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Matúšek, Ondřej
  • Hotař, Vlastimil
  • Clevy, Cedric
  • Laurent, Guillaume
  • Tamadazte, Brahim
http://linked.open...vavai/riv/typAkce
http://linked.open...ain/vavai/riv/wos
  • 000348292400059
http://linked.open.../riv/zahajeniAkce
issn
  • 1660-9336
number of pages
http://bibframe.org/vocab/doi
  • 10.4028/www.scientific.net/AMM.613.426
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  • Trans Tech Publications Ltd
https://schema.org/isbn
  • 978-3-03835-202-0
http://localhost/t...ganizacniJednotka
  • 24210
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