About: Experimental and theoretical study of PECVD in model of hollow substrates.     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • This work is aimed at experimental and theoretical study of active particles behaviour during polymerization processes in RF plasma discharge in acetylene. In the work there are studied penetration processes of C2H2 radicals into the closed slot that has been specially constructed for the purposes of these experiments. Consequential measurements were taken on the layers deposited by the PECVD method in the substrate slot. The layer's thickness on the substrate surface was measured by the optical profilometer after the deposition process. In order to confirm the experimental results, the problem has been studied by computer simulations, too. Therefore, threedimensional model of the diffusion type has been created and the set of differential equations was solved by the powerful and in the last decade popular finite element method (FEM).
  • This work is aimed at experimental and theoretical study of active particles behaviour during polymerization processes in RF plasma discharge in acetylene. In the work there are studied penetration processes of C2H2 radicals into the closed slot that has been specially constructed for the purposes of these experiments. Consequential measurements were taken on the layers deposited by the PECVD method in the substrate slot. The layer's thickness on the substrate surface was measured by the optical profilometer after the deposition process. In order to confirm the experimental results, the problem has been studied by computer simulations, too. Therefore, threedimensional model of the diffusion type has been created and the set of differential equations was solved by the powerful and in the last decade popular finite element method (FEM). (en)
  • Cílem tohoto článku je experimentální a teoretická studie chování aktivních částic běhen polymerizačních procesů v radiofrekvenčním plazmovém výboji v acetylenu. V půráci se studuje ptroces pronikání C2H2 radikálů do uzavřené štěrbiny speciálně zkonstruované pro účely těchlo experimentů. Tloušťka vrstvy na povrchu substrátu byla měřena optickým profilometrem po depozičním procesu. Aby se potvrdily výsledky experimentů, byl problém též studován počítačovou simulací. Tudíž byl vytvořen trojrozměrný model difuzního typu a byla řešena sada diferenciálních rovnic metodou konečných prvků. (cs)
Title
  • Experimental and theoretical study of PECVD in model of hollow substrates.
  • Experimental and theoretical study of PECVD in model of hollow substrates. (en)
  • Experimentální a teoretická studie PECVD v modelu dutých substrátů. (cs)
skos:prefLabel
  • Experimental and theoretical study of PECVD in model of hollow substrates.
  • Experimental and theoretical study of PECVD in model of hollow substrates. (en)
  • Experimentální a teoretická studie PECVD v modelu dutých substrátů. (cs)
skos:notation
  • RIV/46747885:24210/07:@KMT0155!RIV08-MSM-24210___
http://linked.open.../vavai/riv/strany
  • 717-720
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(1M0577)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 421126
http://linked.open...ai/riv/idVysledku
  • RIV/46747885:24210/07:@KMT0155
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • %22PECVD; hollow substrate%22 (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [05FADA5F5BC5]
http://linked.open...v/mistoKonaniAkce
  • Praha
http://linked.open...i/riv/mistoVydani
  • Praha
http://linked.open...i/riv/nazevZdroje
  • XXVIII International Conference on Phenomena in Ionized Gases (ICPIG)
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Špatenka, Petr
  • Bartoš, P.
  • Sedláková, Lenka
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
http://purl.org/ne...btex#hasPublisher
  • Ústav fyziky plazmatu AV ČR
https://schema.org/isbn
  • 978-80-87026-01-4
http://localhost/t...ganizacniJednotka
  • 24210
Faceted Search & Find service v1.16.118 as of Jun 21 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software