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rdf:type
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Description
| - This work is aimed at experimental and theoretical study of active particles behaviour during polymerization processes in RF plasma discharge in acetylene. In the work there are studied penetration processes of C2H2 radicals into the closed slot that has been specially constructed for the purposes of these experiments. Consequential measurements were taken on the layers deposited by the PECVD method in the substrate slot. The layer's thickness on the substrate surface was measured by the optical profilometer after the deposition process. In order to confirm the experimental results, the problem has been studied by computer simulations, too. Therefore, threedimensional model of the diffusion type has been created and the set of differential equations was solved by the powerful and in the last decade popular finite element method (FEM).
- This work is aimed at experimental and theoretical study of active particles behaviour during polymerization processes in RF plasma discharge in acetylene. In the work there are studied penetration processes of C2H2 radicals into the closed slot that has been specially constructed for the purposes of these experiments. Consequential measurements were taken on the layers deposited by the PECVD method in the substrate slot. The layer's thickness on the substrate surface was measured by the optical profilometer after the deposition process. In order to confirm the experimental results, the problem has been studied by computer simulations, too. Therefore, threedimensional model of the diffusion type has been created and the set of differential equations was solved by the powerful and in the last decade popular finite element method (FEM). (en)
- Cílem tohoto článku je experimentální a teoretická studie chování aktivních částic běhen polymerizačních procesů v radiofrekvenčním plazmovém výboji v acetylenu. V půráci se studuje ptroces pronikání C2H2 radikálů do uzavřené štěrbiny speciálně zkonstruované pro účely těchlo experimentů. Tloušťka vrstvy na povrchu substrátu byla měřena optickým profilometrem po depozičním procesu. Aby se potvrdily výsledky experimentů, byl problém též studován počítačovou simulací. Tudíž byl vytvořen trojrozměrný model difuzního typu a byla řešena sada diferenciálních rovnic metodou konečných prvků. (cs)
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Title
| - Experimental and theoretical study of PECVD in model of hollow substrates.
- Experimental and theoretical study of PECVD in model of hollow substrates. (en)
- Experimentální a teoretická studie PECVD v modelu dutých substrátů. (cs)
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skos:prefLabel
| - Experimental and theoretical study of PECVD in model of hollow substrates.
- Experimental and theoretical study of PECVD in model of hollow substrates. (en)
- Experimentální a teoretická studie PECVD v modelu dutých substrátů. (cs)
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skos:notation
| - RIV/46747885:24210/07:@KMT0155!RIV08-MSM-24210___
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/46747885:24210/07:@KMT0155
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - %22PECVD; hollow substrate%22 (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...v/mistoKonaniAkce
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http://linked.open...i/riv/mistoVydani
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http://linked.open...i/riv/nazevZdroje
| - XXVIII International Conference on Phenomena in Ionized Gases (ICPIG)
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Špatenka, Petr
- Bartoš, P.
- Sedláková, Lenka
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http://linked.open...vavai/riv/typAkce
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http://linked.open.../riv/zahajeniAkce
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number of pages
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http://purl.org/ne...btex#hasPublisher
| - Ústav fyziky plazmatu AV ČR
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https://schema.org/isbn
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http://localhost/t...ganizacniJednotka
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