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  • In this work behavior of active particles during process of plasma polymerization by PECVDmethod was investigated. Experimental and theoretical part of the study were carried outsimultaneously.Measurements were taken on the specially constructed closed-slot substrate. Thanks to thissubstrate design, penetration of the active particles during the deposition could be measured.Theoretical part consisted of the mathematical model developement and its implementationas a computer simulation.
  • In this work behavior of active particles during process of plasma polymerization by PECVDmethod was investigated. Experimental and theoretical part of the study were carried outsimultaneously.Measurements were taken on the specially constructed closed-slot substrate. Thanks to thissubstrate design, penetration of the active particles during the deposition could be measured.Theoretical part consisted of the mathematical model developement and its implementationas a computer simulation. (en)
  • V této práci jsme vyšetřovali chování aktivních částic během procesu plazmové polymerace metodou PECVD. Experimentální a praktická část studie byly prováděny současně. Měření proběhla na speciálním úzkoštěrbinovém substrátu.Díky konstrukci tohoto substrátu mohlo být měřeno pronikání aktivních částic během depozice. Teoretická část se skládá z vývoje matematického modelu a jeho implementace počítačovou simulací. (cs)
Title
  • Study of active particles penetration by PECVD method.
  • Studium pronikání aktivních PECVD metodou. (cs)
  • Study of active particles penetration by PECVD method. (en)
skos:prefLabel
  • Study of active particles penetration by PECVD method.
  • Studium pronikání aktivních PECVD metodou. (cs)
  • Study of active particles penetration by PECVD method. (en)
skos:notation
  • RIV/46747885:24210/07:@KMT0126!RIV08-MSM-24210___
http://linked.open.../vavai/riv/strany
  • 23-24
http://linked.open...avai/riv/aktivita
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  • P(1M0577)
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  • 453217
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  • RIV/46747885:24210/07:@KMT0126
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  • %22PECVD; plasma polymerisation; active particle penetration; modeling; computer simulation%22 (en)
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http://linked.open...ontrolniKodProRIV
  • [62A99D8DAC3A]
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  • Liberec
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  • Liberec
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  • International Student Conference of Department of Material Science
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  • Špatenka, Petr
  • Bartoš, P.
  • Sedláková, Lenka
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
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  • Technická univerzita v Liberci
https://schema.org/isbn
  • 978-80-7372-255-5
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  • 24210
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