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Description
  • The aim of this work is design and realisation electrically heated unit for controlled evaporation for PECVD device. The work contains design description of the evaporation unit and its realisation. Experimental measurement of its characteristics has been
  • The aim of this work is design and realisation electrically heated unit for controlled evaporation for PECVD device. The work contains design description of the evaporation unit and its realisation. Experimental measurement of its characteristics has been (en)
  • Cílem této práce je návrh a realizace elektricky vyhřívané jednotky pro řízené vypařování pro PE CVD zařízení. Práce obsahuje popis návrhu vypařovací jednotky a její realizaci. Experimentální měření jejích charakteristik bylo provedeno v PE CVD zařízení, (cs)
Title
  • The design of electrically heated unit for controlled precursor evaporation for PE CVD device.
  • The design of electrically heated unit for controlled precursor evaporation for PE CVD device. (en)
  • Návrh elektricky vyhřívané jednotky pro řízené vypařování prekurzoru pro PE CVD zařízení. (cs)
skos:prefLabel
  • The design of electrically heated unit for controlled precursor evaporation for PE CVD device.
  • The design of electrically heated unit for controlled precursor evaporation for PE CVD device. (en)
  • Návrh elektricky vyhřívané jednotky pro řízené vypařování prekurzoru pro PE CVD zařízení. (cs)
skos:notation
  • RIV/46747885:24210/07:@GKMT023!RIV08-GA0-24210___
http://linked.open.../vavai/riv/strany
  • 28-29
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA202/05/2242), Z(MSM4674788501)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 416415
http://linked.open...ai/riv/idVysledku
  • RIV/46747885:24210/07:@GKMT023
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • %22PECVD; precursor; plasma deposition%22 (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [031C5F95F6B3]
http://linked.open...v/mistoKonaniAkce
  • Liberec
http://linked.open...i/riv/mistoVydani
  • Liberec
http://linked.open...i/riv/nazevZdroje
  • International Student Conference of Department of Material Science
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Špatenka, Petr
  • Cerman, Jiří
  • Kolouch, Aleš
  • Albrecht, D.
  • Macků, Jana
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Technická univerzita v Liberci
https://schema.org/isbn
  • 978-80-7372-255-5
http://localhost/t...ganizacniJednotka
  • 24210
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