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Description
  • UHlíkové vrstvy byly připraveny v mikrovlnovém a radiofrekvenčním plazmovém reaktoru s použitím metody duální frekvence (MW/RF PCVD - microwave and radio frequency plasma chemical vapour deposition). Parametry depozice byly optimalizovaány, aby se získalrovnoměrné filmy na krozivzdorné oceli AISI 316 L. Byly získány čtři filmy z různých směsí plynů(methan/argon), různých mikrovlnových příkonů a hodnot napětí biasu. Zkouška uhlíkových filmů byly provedeny nanoindentací. Cíl této studie bylo vyzkoušenípotencíálové závislosti nanotvrdosti uhlíkových vrstev a jejich vylučovacích podmínek.Nanoindentační experimenty byly provedeny s použitím nanoindentoru XP s diamantovým jehlasnem podle Berkoviche. (cs)
  • Carbon layers were prepared in microwave and radio frequency plasma reactor using dual frequency method (MW/RF PCVD - microwave nad radio frequency plasma chemical vapour deposition). The parameters of the deposition were optimised to get uniform films othe stainless steel AISI 316 L. Four films were obtained from different mixtures of gases (methan/argon), different microwave power and bias voltage values. Under the terms of testing carbon films, the evaluation by nanoindentation method was carried out. The aim of this study was examination of potential dependence between nanohardness of carbon layers and their deposition conditions. Nanoindentation experiments were conducted using a Nanoindentor XP with a diamond Berkovich pyramid indentor.
  • Carbon layers were prepared in microwave and radio frequency plasma reactor using dual frequency method (MW/RF PCVD - microwave nad radio frequency plasma chemical vapour deposition). The parameters of the deposition were optimised to get uniform films othe stainless steel AISI 316 L. Four films were obtained from different mixtures of gases (methan/argon), different microwave power and bias voltage values. Under the terms of testing carbon films, the evaluation by nanoindentation method was carried out. The aim of this study was examination of potential dependence between nanohardness of carbon layers and their deposition conditions. Nanoindentation experiments were conducted using a Nanoindentor XP with a diamond Berkovich pyramid indentor. (en)
Title
  • Properties of carbon coatings deposited in microwave - radio frequencyplasma reactor.
  • Properties of carbon coatings deposited in microwave - radio frequencyplasma reactor. (en)
  • Vlastnosti uhlíkových povlaků vyloučených v mikrovlnovém radiofrekvenčním plazmovém reaktoru. (cs)
skos:prefLabel
  • Properties of carbon coatings deposited in microwave - radio frequencyplasma reactor.
  • Properties of carbon coatings deposited in microwave - radio frequencyplasma reactor. (en)
  • Vlastnosti uhlíkových povlaků vyloučených v mikrovlnovém radiofrekvenčním plazmovém reaktoru. (cs)
skos:notation
  • RIV/46747885:24210/05:24210252!RIV06-MSM-24210___
http://linked.open.../vavai/riv/strany
  • 20
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM4674788501)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 539279
http://linked.open...ai/riv/idVysledku
  • RIV/46747885:24210/05:24210252
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • carbon-depostion-nanoindentation (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [3D8CBE792CDE]
http://linked.open...v/mistoKonaniAkce
  • Bratislava, Slovakia
http://linked.open...i/riv/mistoVydani
  • Bratislava, Slovakia
http://linked.open...i/riv/nazevZdroje
  • Seminar Nanotechnology and Vacuum
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Louda, Petr
  • Šubrtová, Irena
  • Kaczorowski, Witold
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
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  • CEVATECH
https://schema.org/isbn
  • 80-969435-0-2
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  • 24210
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