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  • The PVD-coatings were prepared using Sulzer Innotec’s closed magnetic field unbalanced magnetron sputtering facility. The deposition parameters the bias and oxygen flow rate were changed. The samples prepared were analysed by RBS (Rutherford Backscatterig Spectrometry) to determine the Ti/O ratios and the thicknesses of the coatings and by ERDA (Elastic Recoil Detection Analysis) to investigate the hydrogen content in the surface layer. XPS (X-ray induced Photoelectron Spectroscopy) was used to characteise the near surface composition and chemical bonding. Measurements of mechanical properties (hardness and thickness) were performed. We concluded from RBS analysis that Ti content is enhanced by the increased bias and the decreased oxygen flow rate. Weobserved the increasing hardness according to the higher Ti content in the layers prepared. We found out that the contaminated surface layer exist in which the hydrogen and carbon are incorporated.
  • The PVD-coatings were prepared using Sulzer Innotec’s closed magnetic field unbalanced magnetron sputtering facility. The deposition parameters the bias and oxygen flow rate were changed. The samples prepared were analysed by RBS (Rutherford Backscatterig Spectrometry) to determine the Ti/O ratios and the thicknesses of the coatings and by ERDA (Elastic Recoil Detection Analysis) to investigate the hydrogen content in the surface layer. XPS (X-ray induced Photoelectron Spectroscopy) was used to characteise the near surface composition and chemical bonding. Measurements of mechanical properties (hardness and thickness) were performed. We concluded from RBS analysis that Ti content is enhanced by the increased bias and the decreased oxygen flow rate. Weobserved the increasing hardness according to the higher Ti content in the layers prepared. We found out that the contaminated surface layer exist in which the hydrogen and carbon are incorporated. (en)
  • PVD povlaky byly připraveny za použití zařízení Sulzer Innotec’s closed magnetic field unbalanced magnetron sputtering facility. Vylučovací parametry bias a průtok kyslíku byly měněny.Připravené vzorky byly analyzovány pomocí RBS (Rutherford Backscatterig Spectrometry) k určení poměrů Ti/O a tloušťky povlaků a pomocí ERDA (Elastic Recoil Detection Analysis) k zjištění obsahu vodíkuv povrchové vrstvě. XPS (X-ray induced Photoelectron Spectroscopy) byla použita k characterizaci složení u povrchu a chemiké vazby. Bylo provedeno měření mechanických vlastností (tvrdost a tloušťka).Z RBS analýzplyne, že obsah Ti roste s rostoucím biasem a klesá s klesajícím průtokem kyslíku. Pozorovali jsme vzrůst tvrdosti v souladu s vyšším obsahem Ti v připravených vrstách. Zjistili jsme, že existuje znečištěná povrchová vrstva, v níž je začleněn vodík a uhlík. (cs)
Title
  • RBS a XPS studie TiOx vrstev připravených PVD technikou. (cs)
  • RBS and XPS studies of TiOx layers prepared using PVD technique.
  • RBS and XPS studies of TiOx layers prepared using PVD technique. (en)
skos:prefLabel
  • RBS a XPS studie TiOx vrstev připravených PVD technikou. (cs)
  • RBS and XPS studies of TiOx layers prepared using PVD technique.
  • RBS and XPS studies of TiOx layers prepared using PVD technique. (en)
skos:notation
  • RIV/46747885:24210/04:24210173!RIV/2005/MSM/242105/N
http://linked.open.../vavai/riv/strany
  • %221171;1173%22
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(OC 527.60)
http://linked.open...iv/cisloPeriodika
  • No.8 2004
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 583600
http://linked.open...ai/riv/idVysledku
  • RIV/46747885:24210/04:24210173
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • %22RBS;XPS;layers%22 (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [7BD5771586F8]
http://linked.open...i/riv/nazevZdroje
  • Surface and Interface Analysis
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • Vol.36
http://linked.open...iv/tvurceVysledku
  • Macková, Anna
  • Peřina, Vratislav
  • Zemek, Josef
  • Kolouch, Aleš
  • Krumeich, Jorg
issn
  • 0142-2421
number of pages
http://localhost/t...ganizacniJednotka
  • 24210
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