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Description
  • Složení a struktura tenkých vrstev jsou určeny vylučovací metodou a vylučovacími parametry. Vlastnosti povlaků zahrnující jejich tribologické, optické. elektrické a jiné vlastnosti jsou úzce spojeny s jejich složením a strukturou, což znamená, že jejichunkčnost je přímo určena použitou vylučovací metodou. (cs)
  • Composition and structure of thin layers are determined by deposition method and deposition parameters. Properties of coatings involving mechanical, tribological, optical, electri- cal, and other properties are closely connected to their compo- sition anstructure which means that their functionality is directly determined by the used deposition method. One of the new and very interesting coatings is the titanium oxide thin film. Large application of this film involves protective hard coatings on cuttingtool, optical films for optical filters or photo-catalytic layers. Each application set different demands on the film properties. The aim of the presented work is a comparison of titanium oxide coatings deposited by physical vapor deposition (PVD) and plasma enhanced chemical vapor deposition (PECVD) from various precursors. The films were characterized by various techniques including measurements of hardness and thickness by the ball-and-crater method (Calotest).
  • Composition and structure of thin layers are determined by deposition method and deposition parameters. Properties of coatings involving mechanical, tribological, optical, electri- cal, and other properties are closely connected to their compo- sition anstructure which means that their functionality is directly determined by the used deposition method. One of the new and very interesting coatings is the titanium oxide thin film. Large application of this film involves protective hard coatings on cuttingtool, optical films for optical filters or photo-catalytic layers. Each application set different demands on the film properties. The aim of the presented work is a comparison of titanium oxide coatings deposited by physical vapor deposition (PVD) and plasma enhanced chemical vapor deposition (PECVD) from various precursors. The films were characterized by various techniques including measurements of hardness and thickness by the ball-and-crater method (Calotest). (en)
Title
  • Comparison of titanium oxide coatings deposited by PVD and PECVD.
  • Comparison of titanium oxide coatings deposited by PVD and PECVD. (en)
  • Porovnání povlaků oxidu titanu vyloučených PVD a PECVD. (cs)
skos:prefLabel
  • Comparison of titanium oxide coatings deposited by PVD and PECVD.
  • Comparison of titanium oxide coatings deposited by PVD and PECVD. (en)
  • Porovnání povlaků oxidu titanu vyloučených PVD a PECVD. (cs)
skos:notation
  • RIV/46747885:24210/04:24210172!RIV/2005/MSM/242105/N
http://linked.open.../vavai/riv/strany
  • %2246;49%22
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 242100002)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 558335
http://linked.open...ai/riv/idVysledku
  • RIV/46747885:24210/04:24210172
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • %22TiOx;PVD;PECVD;tribology%22 (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [569CD9EAF1BF]
http://linked.open...v/mistoKonaniAkce
  • Dallas, USA
http://linked.open...i/riv/mistoVydani
  • Dallas, USA
http://linked.open...i/riv/nazevZdroje
  • 47th SVC Annual Technical Conference Proceeding
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Ganev, N.
  • Macková, Anna
  • Polcar, Tomáš
  • Karásek, Jiří
  • Špatenka, Petr
  • Kolouch, Aleš
  • Krumeich, Jorg
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Society of Vacuum Coaters
http://localhost/t...ganizacniJednotka
  • 24210
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