About: RBS and XPS Study of TiOx Layers Prepared by PVD Technique     Goto   Sponge   NotDistinct   Permalink

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  • The PVD-coatings were prepared using Sulzer Innotec’s closed magnetic field unbalanced magnetron sputtering facility. The deposition parameters the bias and oxygen flow rate were changed. The samples prepared were analysed by RBS (Rutherford Backscatterig Spectrometry) to determine the Ti/O ratios and the thicknesses of the coatings and by ERDA (Elastic Recoil Detection Analysis) to investigate the hydrogen content in the surface layer. XPS (X-ray induced Photoelectron Spectroscopy) was used to characteise the near surface composition and chemical bonding. Measurements of mechanical properties (hardness and thickness) were performed. We concluded from RBS analysis that Ti content is enhanced by the increased bias and the decreased oxygen flow rate. We bserved the increasing hardness according to the higher Ti content in the layers prepared. We found out that the contaminated surface layer exist in which the hydrogen and carbon are incorporated.
  • The PVD-coatings were prepared using Sulzer Innotec’s closed magnetic field unbalanced magnetron sputtering facility. The deposition parameters the bias and oxygen flow rate were changed. The samples prepared were analysed by RBS (Rutherford Backscatterig Spectrometry) to determine the Ti/O ratios and the thicknesses of the coatings and by ERDA (Elastic Recoil Detection Analysis) to investigate the hydrogen content in the surface layer. XPS (X-ray induced Photoelectron Spectroscopy) was used to characteise the near surface composition and chemical bonding. Measurements of mechanical properties (hardness and thickness) were performed. We concluded from RBS analysis that Ti content is enhanced by the increased bias and the decreased oxygen flow rate. We bserved the increasing hardness according to the higher Ti content in the layers prepared. We found out that the contaminated surface layer exist in which the hydrogen and carbon are incorporated. (en)
Title
  • RBS and XPS Study of TiOx Layers Prepared by PVD Technique
  • RBS and XPS Study of TiOx Layers Prepared by PVD Technique (en)
skos:prefLabel
  • RBS and XPS Study of TiOx Layers Prepared by PVD Technique
  • RBS and XPS Study of TiOx Layers Prepared by PVD Technique (en)
skos:notation
  • RIV/46747885:24210/03:24210122!RIV/2004/MSM/242104/N
http://linked.open.../vavai/riv/strany
  • %22139;147%22
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 242100002)
http://linked.open...iv/cisloPeriodika
  • 2003
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 624613
http://linked.open...ai/riv/idVysledku
  • RIV/46747885:24210/03:24210122
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • RBS-XPS-TiOx-layers-PVD (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [1433C8F52AFC]
http://linked.open...i/riv/nazevZdroje
  • Surface and Interface Analysis
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • Neuveden
http://linked.open...iv/tvurceVysledku
  • Macková, Anna
  • Peřina, Vratislav
  • Zemek, Josef
  • Kolouch, Aleš
  • Krumeich, Jorg
http://linked.open...n/vavai/riv/zamer
issn
  • 0142-2421
number of pages
http://localhost/t...ganizacniJednotka
  • 24210
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