About: Synthesis of aligned carbon nanotubes by DC plasma-enhanced hot filament CVD

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About: Synthesis of aligned carbon nanotubes by DC plasma-enhanced hot filament CVD Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Aligned structures of carbon nanotubes are promising for electronic and field emission applications. The synthesis can be realized by chemical vapor deposition, namely by catalytic CVD, DC plasma enhanced hot filament CVD, and microwave plasma CVD. Aligned carbon nanotubes have been prepared from different mixtures of methane, hydrogen, argon, and nitrogen on various metal coated silicon substrates between 500 and 800°C by DC plasma enhanced hot filament CVD. In dependence on morphology of the thin metal layer, deposition and plasma parameters different carbon nanostructures have been synthesized. The sputtered metal layer thickness and the hydrogen plasma pretreatment of the metal layer have Aligned structures of carbon nanotubes are promising for electronic and field emission applications. The synthesis can be realized by chemical vapor deposition, namely by catalytic CVD, DC plasma enhanced hot filament CVD, and microwave plasma CVD. Aligned carbon nanotubes have been prepared from different mixtures of methane, hydrogen, argon, and nitrogen on various metal coated silicon substrates between 500 and 800°C by DC plasma enhanced hot filament CVD. In dependence on morphology of the thin metal layer, deposition and plasma parameters different carbon nanostructures have been synthesized. The sputtered metal layer thickness and the hydrogen plasma pretreatment of the metal layer have (en)
Title	Synthesis of aligned carbon nanotubes by DC plasma-enhanced hot filament CVD Synthesis of aligned carbon nanotubes by DC plasma-enhanced hot filament CVD (en)
skos:prefLabel	Synthesis of aligned carbon nanotubes by DC plasma-enhanced hot filament CVD Synthesis of aligned carbon nanotubes by DC plasma-enhanced hot filament CVD (en)
skos:notation	RIV/46747885:24210/02:24210034!RIV/2003/MSM/242103/N
http://linked.open...avai/riv/aktivita	Z
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http://linked.open...vai/riv/dodaniDat	2003
http://linked.open...aciTvurceVysledku	Špatenka, Petr
http://linked.open.../riv/druhVysledku	M - Uspořádání (zorganizování) konference
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Technická univerzita v Liberci / Fakulta strojní
http://linked.open...dnocenehoVysledku	666157
http://linked.open...ai/riv/idVysledku	RIV/46747885:24210/02:24210034
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	%22carbon;plasma;nanotubes%22 (en)
http://linked.open.../riv/klicoveSlovo	plasma %22carbon nanotubes%22
http://linked.open...ontrolniKodProRIV	[4459BF1A1668]
http://linked.open...v/mistoKonaniAkce	Amsterdam
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
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http://linked.open...ocetUcastnikuAkce	30 (xsd:int)
http://linked.open...nichUcastnikuAkce	5 (xsd:int)
http://linked.open...UplatneniVysledku	2002
http://linked.open...iv/statKonaniAkce	NL - Nizozemsko
http://linked.open...iv/tvurceVysledku	Špatenka, Petr Pácal, František Leonhardt, Albrecht Taeschner, Christine Graff, Andreas Kaltofen, Rainer
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/ukonceniAkce	2002-11-07 (xsd:date)
http://linked.open.../riv/zahajeniAkce	2002-11-05 (xsd:date)
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