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Description
| - Aligned structures of carbon nanotubes are promising for electronic and field emission applications. The synthesis can be realized by chemical vapor deposition, namely by catalytic CVD, DC plasma enhanced hot filament CVD, and microwave plasma CVD. Aligned carbon nanotubes have been prepared from different mixtures of methane, hydrogen, argon, and nitrogen on various metal coated silicon substrates between 500 and 800°C by DC plasma enhanced hot filament CVD. In dependence on morphology of the thin metal layer, deposition and plasma parameters different carbon nanostructures have been synthesized. The sputtered metal layer thickness and the hydrogen plasma pretreatment of the metal layer have
- Aligned structures of carbon nanotubes are promising for electronic and field emission applications. The synthesis can be realized by chemical vapor deposition, namely by catalytic CVD, DC plasma enhanced hot filament CVD, and microwave plasma CVD. Aligned carbon nanotubes have been prepared from different mixtures of methane, hydrogen, argon, and nitrogen on various metal coated silicon substrates between 500 and 800°C by DC plasma enhanced hot filament CVD. In dependence on morphology of the thin metal layer, deposition and plasma parameters different carbon nanostructures have been synthesized. The sputtered metal layer thickness and the hydrogen plasma pretreatment of the metal layer have (en)
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Title
| - Synthesis of aligned carbon nanotubes by DC plasma-enhanced hot filament CVD
- Synthesis of aligned carbon nanotubes by DC plasma-enhanced hot filament CVD (en)
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skos:prefLabel
| - Synthesis of aligned carbon nanotubes by DC plasma-enhanced hot filament CVD
- Synthesis of aligned carbon nanotubes by DC plasma-enhanced hot filament CVD (en)
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skos:notation
| - RIV/46747885:24210/02:24210034!RIV/2003/MSM/242103/N
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http://linked.open...avai/riv/aktivita
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http://linked.open...ai/riv/idVysledku
| - RIV/46747885:24210/02:24210034
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - %22carbon;plasma;nanotubes%22 (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...iv/tvurceVysledku
| - Špatenka, Petr
- Pácal, František
- Leonhardt, Albrecht
- Taeschner, Christine
- Graff, Andreas
- Kaltofen, Rainer
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http://linked.open...vavai/riv/typAkce
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