About: The role of internal plasma parameters on carbon nanotubes growth in plasma enhanced hot filament CVD     Goto   Sponge   NotDistinct   Permalink

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  • Aligned CNT have been successfully synthesized from methane, argon and hydrogen mixtures by plasma enhanced hot filament CVD on different substrates. In order to inspect the behaviour of the plasma produced with the DC-bias and its role on the aligned growth of the nanotubes, the internal plasma parameters were measured by Langmuir probes and OES techniques. Our experiments confirmed that the presence both of the plasma and the bias are necessary for formation of aligned nanotubes in the dual hot-wire/dc-bias deposition reactor. Several hypotheses about the role of the electrical field on the alignment of the nanotubes will be discussed.
  • Aligned CNT have been successfully synthesized from methane, argon and hydrogen mixtures by plasma enhanced hot filament CVD on different substrates. In order to inspect the behaviour of the plasma produced with the DC-bias and its role on the aligned growth of the nanotubes, the internal plasma parameters were measured by Langmuir probes and OES techniques. Our experiments confirmed that the presence both of the plasma and the bias are necessary for formation of aligned nanotubes in the dual hot-wire/dc-bias deposition reactor. Several hypotheses about the role of the electrical field on the alignment of the nanotubes will be discussed. (en)
Title
  • The role of internal plasma parameters on carbon nanotubes growth in plasma enhanced hot filament CVD
  • The role of internal plasma parameters on carbon nanotubes growth in plasma enhanced hot filament CVD (en)
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  • The role of internal plasma parameters on carbon nanotubes growth in plasma enhanced hot filament CVD
  • The role of internal plasma parameters on carbon nanotubes growth in plasma enhanced hot filament CVD (en)
skos:notation
  • RIV/46747885:24210/02:24210030!RIV/2003/MSM/242103/N
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  • 662639
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  • RIV/46747885:24210/02:24210030
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  • %22carbon;CVD; nanotubes;plasma%22 (en)
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  • [8636B2961476]
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  • Amsterdam
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  • Blažek, Josef
  • Špatenka, Petr
  • Pácal, František
  • Leonhardt, Albrecht
  • Taeschner, Christine
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  • 24210
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