About: Properties of Magnetron Deposited Variable Fe Doped SnO2 Thin Films for Gas

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The Fe doped SnO2 thin films for gas sensors applications were deposited by RF magnetron cosputtering of SnO2 and Fe dopand using a single sputter target with a variable SnO2/Fe ratio in the argon gas. The coatings were deposited in two different off-axis positions. The first position, the angle between planes of the substrate and target was 30o from parallel plane where the upside of substrate was toward to the target to allow shadowing effects. The second position was selected to reduce a higher energy ion bombardment on the growing film by positioning substrate perpendicular to target. The surface morphology of the films was controlled from very smooth up to orange-peel like structure simply by RF power and the position of substrates. The Fe content in coating was tunable in wide range by adjusting Fe ratio on the target and by variation of RF power. The Fe content was evaluated from XPS spectra by deconvolution of two overlapped peaks Sn 3p and Fe 2p and from RBS. Beam of He+ ions 2.0 MeV was used The Fe doped SnO2 thin films for gas sensors applications were deposited by RF magnetron cosputtering of SnO2 and Fe dopand using a single sputter target with a variable SnO2/Fe ratio in the argon gas. The coatings were deposited in two different off-axis positions. The first position, the angle between planes of the substrate and target was 30o from parallel plane where the upside of substrate was toward to the target to allow shadowing effects. The second position was selected to reduce a higher energy ion bombardment on the growing film by positioning substrate perpendicular to target. The surface morphology of the films was controlled from very smooth up to orange-peel like structure simply by RF power and the position of substrates. The Fe content in coating was tunable in wide range by adjusting Fe ratio on the target and by variation of RF power. The Fe content was evaluated from XPS spectra by deconvolution of two overlapped peaks Sn 3p and Fe 2p and from RBS. Beam of He+ ions 2.0 MeV was used (en)
Title	Properties of Magnetron Deposited Variable Fe Doped SnO2 Thin Films for Gas Properties of Magnetron Deposited Variable Fe Doped SnO2 Thin Films for Gas (en)
skos:prefLabel	Properties of Magnetron Deposited Variable Fe Doped SnO2 Thin Films for Gas Properties of Magnetron Deposited Variable Fe Doped SnO2 Thin Films for Gas (en)
skos:notation	RIV/44555601:13440/09:00004869!RIV10-MSM-13440___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(KAN400720701), P(LC06041)
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Kormunda, Martin Pavlík, Jaroslav Malinský, Petr
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Univerzita Jana Evangelisty Purkyně v Ústí nad Labem / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	337169
http://linked.open...ai/riv/idVysledku	RIV/44555601:13440/09:00004869
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Fe doped SnO2 thin films; gas sensors; RF magnetron sputtering; XPS; RBS (en)
http://linked.open.../riv/klicoveSlovo	gas sensors XPS RBS Fe doped SnO2 thin films RF magnetron sputtering
http://linked.open...ontrolniKodProRIV	[1A09CC207C2F]
http://linked.open...v/mistoKonaniAkce	Liptovský Ján, Slovakia
http://linked.open...i/riv/mistoVydani	Bratislava, Slovakia
http://linked.open...i/riv/nazevZdroje	Book of Contributed Papers of 17th Symposium on Application of Plasma Processe- Visegrad Workshop on Research of Plasma Physics
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...vavai/riv/projekt	Hierarchic nanosystems for microelektronics Preparation, modification and characterization of materials by energetic radiation.
http://linked.open...UplatneniVysledku	2009
http://linked.open...iv/tvurceVysledku	Kormunda, Martin Malinský, Petr Pavlík, Jaroslav
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2009-01-17 (xsd:date)
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Comenius University in Bratislava; Humboldt-Club Slovakia Bratislava
https://schema.org/isbn	978-80-89186-46-4
http://localhost/t...ganizacniJednotka	13440

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