About: Dynamics of plasma -surface interactions in chemically active plasmas

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The contribution presents results of computer simulations describing the interaction between a low-temperature multicomponent plasma and an immersed metal substrate. For this purpose two models were prepared. The first model is designed to follow the volume processes in oxygen-containing electronegative plasma. The technique used was the macroscopic kinetic approach with a kinetic scheme consisting of more than 100 reactions. As a result, the concentrations of individual charged species for various discharge parameters were derived. These species are used as input parameters in the second model based on the Particle-in-Cell?Monte Carlo Collision (PIC?MCC) particle simulation technique. The sheath structure of the multicomponent plasma containing more than one type of negative as well as positive ions and the fluxes of individual charged species impinging the oxidized substrates were studied with the help of this model. The contribution presents results of computer simulations describing the interaction between a low-temperature multicomponent plasma and an immersed metal substrate. For this purpose two models were prepared. The first model is designed to follow the volume processes in oxygen-containing electronegative plasma. The technique used was the macroscopic kinetic approach with a kinetic scheme consisting of more than 100 reactions. As a result, the concentrations of individual charged species for various discharge parameters were derived. These species are used as input parameters in the second model based on the Particle-in-Cell?Monte Carlo Collision (PIC?MCC) particle simulation technique. The sheath structure of the multicomponent plasma containing more than one type of negative as well as positive ions and the fluxes of individual charged species impinging the oxidized substrates were studied with the help of this model. (en)
Title	Dynamics of plasma -surface interactions in chemically active plasmas Dynamics of plasma -surface interactions in chemically active plasmas (en)
skos:prefLabel	Dynamics of plasma -surface interactions in chemically active plasmas Dynamics of plasma -surface interactions in chemically active plasmas (en)
skos:notation	RIV/44555601:13440/09:00004849!RIV10-MSM-13440___
http://linked.open...avai/riv/aktivita	P S Z
http://linked.open...avai/riv/aktivity	P(KAN400720701), P(LC06041), S, Z(MSM0021620834)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Černý, Pavel Hrach, Rudolf Novák, Stanislav
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Univerzita Jana Evangelisty Purkyně v Ústí nad Labem / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	311716
http://linked.open...ai/riv/idVysledku	RIV/44555601:13440/09:00004849
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Plasma?surface interaction; Simulation methods; Particle-in-Cell method Plasma?surface interaction; Simulation methods; Particle-in-Cell method Plasma?surface interaction; Simulation methods; Particle-in-Cell method Plasma?surface interaction; Simulation methods; Particle-in-Cell method (en)
http://linked.open.../riv/klicoveSlovo	Simulation methods Particle-in-Cell method Particle-in-Cell method Plasma?surface interaction Plasma?surface interaction
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[95ED3FBF99BA]
http://linked.open...i/riv/nazevZdroje	Vacuum
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...vavai/riv/projekt	Hierarchic nanosystems for microelektronics Preparation, modification and characterization of materials by energetic radiation.
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	84
http://linked.open...iv/tvurceVysledku	Hrach, Rudolf Novák, Stanislav Černý, Pavel
http://linked.open...ain/vavai/riv/wos	000270625900024
http://linked.open...n/vavai/riv/zamer	Condensed Matter Physics – New Materials and Technologies
issn	0042-207X
number of pages	4 (xsd:int)
http://localhost/t...ganizacniJednotka	13440

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