About: Study of SnO2 Thin Films Prepared by Plasma Assisted Deposition Techniques

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Study of SnO2 Thin Films Prepared by Plasma Assisted Deposition Techniques Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	V této práci byly studovány povrchové a strukturální vlastnosti tenkých vrstev SnO2 připravených plazmovou oxidací tenkých cínových vrstev a RF, DC reaktivním naprašováním cínu ve směsi kyslíku a argonem. (cs) Thin films of oxide materials have high potential for device applications. Development of gas sensors in last few years has shown an important interest in thin tin oxide films. The SnO2 is one of the most widely used materials for gas sensor applications due to their good performance for a detection of oxidable gases. When SnO2 layers are used in gas sensors, some features can depend on many layer parameters as thickness, cluster size, roughness, etc. Since the properties of the material are strongly dependent on the procedure of preparation, different techniques have been employed to obtain SnO2 thin films [1, 2, 3, 4]. In this work we have studied surface properties and tructure of SnO2 thin films prepared both by plasma oxidation of the thin tin films [5] and by RF or DC magnetron reactive sputtering of tin target in oxygen + argon mixture tmosphere. Tin dioxide films were prepared by RF sputtering of SnO2 target using argon or oxygen as working gas, too. Thin films of oxide materials have high potential for device applications. Development of gas sensors in last few years has shown an important interest in thin tin oxide films. The SnO2 is one of the most widely used materials for gas sensor applications due to their good performance for a detection of oxidable gases. When SnO2 layers are used in gas sensors, some features can depend on many layer parameters as thickness, cluster size, roughness, etc. Since the properties of the material are strongly dependent on the procedure of preparation, different techniques have been employed to obtain SnO2 thin films [1, 2, 3, 4]. In this work we have studied surface properties and tructure of SnO2 thin films prepared both by plasma oxidation of the thin tin films [5] and by RF or DC magnetron reactive sputtering of tin target in oxygen + argon mixture tmosphere. Tin dioxide films were prepared by RF sputtering of SnO2 target using argon or oxygen as working gas, too. (en)
Title	Study of SnO2 Thin Films Prepared by Plasma Assisted Deposition Techniques Studium tenkých vrstev SnO2 připravených depozičními technikami za asistence plazmatu (cs) Study of SnO2 Thin Films Prepared by Plasma Assisted Deposition Techniques (en)
skos:prefLabel	Study of SnO2 Thin Films Prepared by Plasma Assisted Deposition Techniques Studium tenkých vrstev SnO2 připravených depozičními technikami za asistence plazmatu (cs) Study of SnO2 Thin Films Prepared by Plasma Assisted Deposition Techniques (en)
skos:notation	RIV/44555601:13440/07:00003909!RIV08-MSM-13440___
http://linked.open.../vavai/riv/strany	245-246
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(LC06041), P(OC 143)
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Pavlík, Jaroslav Matoušek, Jindřich Strýhal, Zdeněk
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Univerzita Jana Evangelisty Purkyně v Ústí nad Labem / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	453310
http://linked.open...ai/riv/idVysledku	RIV/44555601:13440/07:00003909
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	SnO2; sensor; plasma assisted deposition techniques (en)
http://linked.open.../riv/klicoveSlovo	plasma assisted deposition techniques sensor SnO2
http://linked.open...ontrolniKodProRIV	[1D007FAF401C]
http://linked.open...i/riv/mistoVydani	Bratislava, Slovensko
http://linked.open...i/riv/nazevZdroje	Proceedings of 16th-Symposium on Application of Plasma Processes
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Preparation, modification and characterization of materials by energetic radiation. http://linked.opendata.cz/resource/domain/vavai/projekt/OC%20143
http://linked.open...UplatneniVysledku	2007
http://linked.open...iv/tvurceVysledku	Matoušek, Jindřich Pavlík, Jaroslav Strýhal, Zdeněk Vagner, T.
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Univerzita Komenského v Bratislave. Vydavateľstvo
https://schema.org/isbn	978-80-89186-13-6
http://localhost/t...ganizacniJednotka	13440

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software