About: Study of plasma-solid interaction in electronegative gas mixtures: Influence of substrate geometry     Goto   Sponge   NotDistinct   Permalink

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  • Článek se zabývá elektornegativním plazmatem ve směsi argonu a kyslíku a uvádí výsledky počítačového studia procesů probíhajících v oblasti stínící vrstvy, tj. v blízkosti kovových substrátů. Je ukázán vliv složení plazmatu a geomertie substrátu pro případ rovinné a válcové sondy. (cs)
  • The paper deals with electronegative plasmas of mixture argon and oxygen and show the results mainly of computer study of processes taking part in the plasma sheath region, in the vicinity of metal substrates. The influence of substrate geometry for planar and cylindrical probe as well as of plasma composition is shown.
  • The paper deals with electronegative plasmas of mixture argon and oxygen and show the results mainly of computer study of processes taking part in the plasma sheath region, in the vicinity of metal substrates. The influence of substrate geometry for planar and cylindrical probe as well as of plasma composition is shown. (en)
Title
  • Study of plasma-solid interaction in electronegative gas mixtures: Influence of substrate geometry
  • Study of plasma-solid interaction in electronegative gas mixtures: Influence of substrate geometry (en)
  • Studium interakce pevná látka - plazma ve směsích elektonegativních plynů. (cs)
skos:prefLabel
  • Study of plasma-solid interaction in electronegative gas mixtures: Influence of substrate geometry
  • Study of plasma-solid interaction in electronegative gas mixtures: Influence of substrate geometry (en)
  • Studium interakce pevná látka - plazma ve směsích elektonegativních plynů. (cs)
skos:notation
  • RIV/44555601:13440/07:00003905!RIV08-AV0-13440___
http://linked.open.../vavai/riv/strany
  • 34-37
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(KAN101120701), P(LC06041)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 453295
http://linked.open...ai/riv/idVysledku
  • RIV/44555601:13440/07:00003905
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • plasma-solid interaction; electronegative plasma; substrate geometry (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [946C1948C5EB]
http://linked.open...i/riv/mistoVydani
  • Kyoto, Japan
http://linked.open...i/riv/nazevZdroje
  • Full-Papers CD-18th International Symposium on Plasma Chemistry
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
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http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Hrach, Rudolf
  • Černý, P.
  • Novák, Stanislav
  • Bruna, P.
  • Hrachová, V.
number of pages
http://purl.org/ne...btex#hasPublisher
  • Kyoto University, Japan, Edited by K. Tachibana
https://schema.org/isbn
  • 978-4-9903773-2-8
http://localhost/t...ganizacniJednotka
  • 13440
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