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  • Atomic Force Microscopy (AFM) and Secondary Ion Mass Spectrometry (SIMS) have been used to characterize surface morphology and structure of SnO2 thin films prepared by plasma oxidation. The surface structure of the SnO2 thin films was found to be dependent on the plasma oxidizing mixture (oxygen /argon) parameters.
  • Atomic Force Microscopy (AFM) and Secondary Ion Mass Spectrometry (SIMS) have been used to characterize surface morphology and structure of SnO2 thin films prepared by plasma oxidation. The surface structure of the SnO2 thin films was found to be dependent on the plasma oxidizing mixture (oxygen /argon) parameters. (en)
  • Mikroskopie atomárních sil (AFM) a hmotnostní spektrometrie sekundárních iontů (SIMS) byly použity pro charakterizaci morfologie a struktury povrchu tenkých vrstev SnO2 připravených plazmovou oxidací. Stechiometrie tenkých vrstev SnO2 závisí na parametrech plazmatu buzeného ve směsi argonu a kyslíku během plazmové oxidace. (cs)
Title
  • The plasma oxidation of tin thin films: AFM and SIMS study
  • Plazmová oxidace tenkých vrstev cínu: AFM a SIMS studium (cs)
  • The plasma oxidation of tin thin films: AFM and SIMS study (en)
skos:prefLabel
  • The plasma oxidation of tin thin films: AFM and SIMS study
  • Plazmová oxidace tenkých vrstev cínu: AFM a SIMS studium (cs)
  • The plasma oxidation of tin thin films: AFM and SIMS study (en)
skos:notation
  • RIV/44555601:13440/05:00003098!RIV06-MSM-13440___
http://linked.open.../vavai/riv/strany
  • 251-252
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(OC 527.50)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 536177
http://linked.open...ai/riv/idVysledku
  • RIV/44555601:13440/05:00003098
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  • plasma oxidation; AFM; SIMS; tin dioxide (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [F9670249526E]
http://linked.open...v/mistoKonaniAkce
  • Podbánské, Slovakia
http://linked.open...i/riv/mistoVydani
  • Bratislava, Slovakia
http://linked.open...i/riv/nazevZdroje
  • Proceedings of the 15th SAPP and 3rd EU-Japan Joint Symposium on Plasma Processing
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http://linked.open...iv/tvurceVysledku
  • Pavlík, Jaroslav
  • Strýhal, Zdeněk
  • Boris, I.
  • Cokeliler, D.
  • Vágner, T.
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
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  • Univerzita Komenského v Bratislave. Vydavateľstvo
https://schema.org/isbn
  • 80-223-2018-8
http://localhost/t...ganizacniJednotka
  • 13440
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