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  • The complete process of plasma oxidation of metals in oxygen plasma consists of several stages: activation of oxygen in discharge, transport of charged species from undisturbed plasma to metal substrate immersed into the plasma, processes on the surface and the growth of oxide layers including the ion transport through growing oxide film. In the contribution the plasma oxidation of aluminium and tin in pure oxygen and in oxygen/argon mixtures is analysed, the methods of study being both the direct measurement and computer simulation.
  • The complete process of plasma oxidation of metals in oxygen plasma consists of several stages: activation of oxygen in discharge, transport of charged species from undisturbed plasma to metal substrate immersed into the plasma, processes on the surface and the growth of oxide layers including the ion transport through growing oxide film. In the contribution the plasma oxidation of aluminium and tin in pure oxygen and in oxygen/argon mixtures is analysed, the methods of study being both the direct measurement and computer simulation. (en)
  • Celkový proces plazmové oxidace kovů v kyslíkovém plazmatu zahrnuje několik stadií jako aktivaci částic v kyslíkovém výboji, transport nabitých částic z neporušeného plazmatu k povrchu kovu vnořeného do plazmatu, procesy na povrchu a růst vrstvy oxidu včetně transportu iontů skrz vytvářenou vrstvu oxidu. V příspěvku je analysována plazmová oxidace hliníku a cínu v čistém kyslíku a směsi kyslík/argon. Použitými metodami studia jsou jak přímá experimentální měření, tak počítačové simulace. (cs)
Title
  • Modelling of plasma-surface interactions during plasma oxidation process
  • Modelling of plasma-surface interactions during plasma oxidation process (en)
  • Modelování interakce plazmatu s povrchem během procesu plazmové oxidace (cs)
skos:prefLabel
  • Modelling of plasma-surface interactions during plasma oxidation process
  • Modelling of plasma-surface interactions during plasma oxidation process (en)
  • Modelování interakce plazmatu s povrchem během procesu plazmové oxidace (cs)
skos:notation
  • RIV/44555601:13440/05:00003091!RIV06-MSM-13440___
http://linked.open...avai/riv/aktivita
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  • P(1K04115)
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  • 530662
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  • RIV/44555601:13440/05:00003091
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  • plasma oxidation; modelling of plasma-surface interactions (en)
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  • [9BFBEBCFA5C1]
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  • Toronto, Canada
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  • CD
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  • Centre for Advanced Coating Technologies, Faculty of Applied
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http://linked.open...vavai/riv/projekt
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http://linked.open...iv/tvurceVysledku
  • Hrach, Rudolf
  • Pavlík, Jaroslav
  • Novák, Stanislav
  • Hrachová, V.
http://localhost/t...ganizacniJednotka
  • 13440
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