About: Surface Characterization of Tin Oxide Thin Films for Gas Sensors Prepared by Plasma Oxidation

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About: Surface Characterization of Tin Oxide Thin Films for Gas Sensors Prepared by Plasma Oxidation Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Thin SnO2 films have wide range of applications (electronics, special coatings, etc.). Mostly, it is used when conductivity and transparency is required or in gas sensors. Tin oxide films of unique properties and of high quality can be prepared usually by techniques such as chemical vapour deposition, spray pyrolysis, evaporation, and sputtering. In this work, we have studied properties of SnO2 thin films produced by a thermal evaporation of Sn films followed by in situ plasma oxidation. The post-deposition analysis of films includes Atomic Force Microscopy (AFM), Rutherford backscattering spectrometry (RBS), Secondary Ion Mass Spectrometry (SIMS). Thin SnO2 films have wide range of applications (electronics, special coatings, etc.). Mostly, it is used when conductivity and transparency is required or in gas sensors. Tin oxide films of unique properties and of high quality can be prepared usually by techniques such as chemical vapour deposition, spray pyrolysis, evaporation, and sputtering. In this work, we have studied properties of SnO2 thin films produced by a thermal evaporation of Sn films followed by in situ plasma oxidation. The post-deposition analysis of films includes Atomic Force Microscopy (AFM), Rutherford backscattering spectrometry (RBS), Secondary Ion Mass Spectrometry (SIMS). (en)
Title	Surface Characterization of Tin Oxide Thin Films for Gas Sensors Prepared by Plasma Oxidation Surface Characterization of Tin Oxide Thin Films for Gas Sensors Prepared by Plasma Oxidation (en)
skos:prefLabel	Surface Characterization of Tin Oxide Thin Films for Gas Sensors Prepared by Plasma Oxidation Surface Characterization of Tin Oxide Thin Films for Gas Sensors Prepared by Plasma Oxidation (en)
skos:notation	RIV/44555601:13430/03:00002342!RIV/2004/MSM/134304/N
http://linked.open.../vavai/riv/strany	144-145
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(OC 527.50), Z(MSM 134300001)
http://linked.open...vai/riv/dodaniDat	2004
http://linked.open...aciTvurceVysledku	Pavlík, Jaroslav Macková, Anna Strýhal, Zdeněk
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Univerzita Jana Evangelisty Purkyně v Ústí nad Labem / Pedagogická fakulta
http://linked.open...dnocenehoVysledku	629772
http://linked.open...ai/riv/idVysledku	RIV/44555601:13430/03:00002342
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	SnO2, AFNM RBS, plasma oxidation (en)
http://linked.open.../riv/klicoveSlovo	SnO2 plasma oxidation AFNM RBS
http://linked.open...ontrolniKodProRIV	[469CD7DC3D9B]
http://linked.open...v/mistoKonaniAkce	Liptovský Mikuláš
http://linked.open...i/riv/mistoVydani	Liptovský Mikuláš
http://linked.open...i/riv/nazevZdroje	Proceedings of the 14 th Symposium of Application of Plasma Processes
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...vavai/riv/projekt	http://linked.opendata.cz/resource/domain/vavai/projekt/OC%20527.50
http://linked.open...UplatneniVysledku	2003
http://linked.open...iv/tvurceVysledku	Macková, Anna Pavlík, Jaroslav Strýhal, Zdeněk Peřina, Václav
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2003-01-13 (xsd:date)
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20134300001
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Military Academy
https://schema.org/isbn	80-8040-195-0
http://localhost/t...ganizacniJednotka	13430

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