About: Study of Gas Impurities and Discharge Tube Material Influence on Plasma Composition during Plasma Oxidation: The Optical Emission Spectroscopy Study,

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Study of Gas Impurities and Discharge Tube Material Influence on Plasma Composition during Plasma Oxidation: The Optical Emission Spectroscopy Study, Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Plasma-wall interactions in discharge tube can generate trace impurities. These impurities together with impurities coming from gas bottles can play an important role in plasma oxidation process, since they can significantly influence plasma composition and consequently its properties. The paper deals with a comparative study of plasma characteristics obtained both for plasma generated in RF discharge in technological system for plasma surface modification and for plasma generated in DC discharge in laboratory system containing a glass discharge tube with high wall purity. The discharges were applied in pure oxygen. The main diagnostic technique applied in order to determine qualitative plasma composition was the optical emission spectrometry. We have mainly focused on atomic oxygen spectral lines and on the bands and lines of gas impurities. The gas impurities and the wall material of plasma source can significantly change the plasma properties during plasma oxidation. The optical emission spectr Plasma-wall interactions in discharge tube can generate trace impurities. These impurities together with impurities coming from gas bottles can play an important role in plasma oxidation process, since they can significantly influence plasma composition and consequently its properties. The paper deals with a comparative study of plasma characteristics obtained both for plasma generated in RF discharge in technological system for plasma surface modification and for plasma generated in DC discharge in laboratory system containing a glass discharge tube with high wall purity. The discharges were applied in pure oxygen. The main diagnostic technique applied in order to determine qualitative plasma composition was the optical emission spectrometry. We have mainly focused on atomic oxygen spectral lines and on the bands and lines of gas impurities. The gas impurities and the wall material of plasma source can significantly change the plasma properties during plasma oxidation. The optical emission spectr (en)
Title	Study of Gas Impurities and Discharge Tube Material Influence on Plasma Composition during Plasma Oxidation: The Optical Emission Spectroscopy Study, Study of Gas Impurities and Discharge Tube Material Influence on Plasma Composition during Plasma Oxidation: The Optical Emission Spectroscopy Study, (en)
skos:prefLabel	Study of Gas Impurities and Discharge Tube Material Influence on Plasma Composition during Plasma Oxidation: The Optical Emission Spectroscopy Study, Study of Gas Impurities and Discharge Tube Material Influence on Plasma Composition during Plasma Oxidation: The Optical Emission Spectroscopy Study, (en)
skos:notation	RIV/44555601:13430/03:00002320!RIV/2004/MSM/134304/N
http://linked.open.../vavai/riv/strany	174-176
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA202/03/0827), P(OC 527.50), Z(MSM 113200002), Z(MSM 134300001)
http://linked.open...iv/cisloPeriodika	307-suppl.
http://linked.open...vai/riv/dodaniDat	2004
http://linked.open...aciTvurceVysledku	Pavlík, Jaroslav Strýhal, Zdeněk
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Univerzita Jana Evangelisty Purkyně v Ústí nad Labem / Pedagogická fakulta
http://linked.open...dnocenehoVysledku	629553
http://linked.open...ai/riv/idVysledku	RIV/44555601:13430/03:00002320
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	OES, plasma oxidation (en)
http://linked.open.../riv/klicoveSlovo	OES plasma oxidation
http://linked.open...odStatuVydavatele	FR - Francouzská republika
http://linked.open...ontrolniKodProRIV	[C9114DD9CC67]
http://linked.open...i/riv/nazevZdroje	Le Vide
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...vavai/riv/projekt	A study of elementary processes in low-temperature and technologically oriented plasmas and the development of relevant diagnostic methods http://linked.opendata.cz/resource/domain/vavai/projekt/OC%20527.50
http://linked.open...UplatneniVysledku	2003
http://linked.open...v/svazekPeriodika	58
http://linked.open...iv/tvurceVysledku	Hrachová, Věra Matoušek, Jindřich Pavlík, Jaroslav Kylian, O. Strýhal, Zdeněk Kaňka, A.
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20113200002 http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20134300001
issn	1266-0167
number of pages	3 (xsd:int)
http://localhost/t...ganizacniJednotka	13430

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software