About: The Combined Study of the HMSDO Layers by RBS, ERDA and AFM Analytical Methods obtained from PECVD and PACVD

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About: The Combined Study of the HMSDO Layers by RBS, ERDA and AFM Analytical Methods obtained from PECVD and PACVD Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this work, we have studied the composition and surface morphology of the HMSDO layers produced by plasma deposition through three separate processes: a RF Inductively Coupled Plasma (RFICP), a Microwave Distributed ECR plasma, and a Microwave Induced Remote nitrogen Afterglow (MIRA). A thin layer (1000 A) and a thicker one (1 ?m) obtained from polymerisation of Hexa- and Treta-methyledisiloxane compounds to evaluate the resulting quality of the films in term of growth and sensitivity to the process type. We investigated two sets of the samples, one set prepared on the silicon substrate and the second set on the polypropylene substrate. The layer composition was investigated by Rutherford Backscattering Spectrometry (RBS) and by Elastic Recoil Detection Analysis (ERDA) and the layer surface morphology was determined by AFM. In this work, we have studied the composition and surface morphology of the HMSDO layers produced by plasma deposition through three separate processes: a RF Inductively Coupled Plasma (RFICP), a Microwave Distributed ECR plasma, and a Microwave Induced Remote nitrogen Afterglow (MIRA). A thin layer (1000 A) and a thicker one (1 ?m) obtained from polymerisation of Hexa- and Treta-methyledisiloxane compounds to evaluate the resulting quality of the films in term of growth and sensitivity to the process type. We investigated two sets of the samples, one set prepared on the silicon substrate and the second set on the polypropylene substrate. The layer composition was investigated by Rutherford Backscattering Spectrometry (RBS) and by Elastic Recoil Detection Analysis (ERDA) and the layer surface morphology was determined by AFM. (en)
Title	The Combined Study of the HMSDO Layers by RBS, ERDA and AFM Analytical Methods obtained from PECVD and PACVD The Combined Study of the HMSDO Layers by RBS, ERDA and AFM Analytical Methods obtained from PECVD and PACVD (en)
skos:prefLabel	The Combined Study of the HMSDO Layers by RBS, ERDA and AFM Analytical Methods obtained from PECVD and PACVD The Combined Study of the HMSDO Layers by RBS, ERDA and AFM Analytical Methods obtained from PECVD and PACVD (en)
skos:notation	RIV/44555601:13430/03:00002311!RIV/2004/MSM/134304/N
http://linked.open.../vavai/riv/strany	214-215
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(OC 527.50)
http://linked.open...vai/riv/dodaniDat	2004
http://linked.open...aciTvurceVysledku	Pavlík, Jaroslav Macková, Anna Strýhal, Zdeněk
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Univerzita Jana Evangelisty Purkyně v Ústí nad Labem / Pedagogická fakulta
http://linked.open...dnocenehoVysledku	601577
http://linked.open...ai/riv/idVysledku	RIV/44555601:13430/03:00002311
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	plasma polymer (en)
http://linked.open.../riv/klicoveSlovo	plasma polymer
http://linked.open...ontrolniKodProRIV	[C035A3B16024]
http://linked.open...v/mistoKonaniAkce	Liptovský Mikuláš
http://linked.open...i/riv/mistoVydani	Liptovský Mikuláš
http://linked.open...i/riv/nazevZdroje	Proceedings of SAPP XIV, Post Deadline Papers
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	10 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...vavai/riv/projekt	http://linked.opendata.cz/resource/domain/vavai/projekt/OC%20527.50
http://linked.open...UplatneniVysledku	2003
http://linked.open...iv/tvurceVysledku	Macková, Anna Pavlík, Jaroslav Granier, A. Hnatowicz, V. Strýhal, Zdeněk Supiot, P. Peřina, Václav Borvon, G. Quede, A. Raynaud, P.
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2003-01-13 (xsd:date)
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Military Academy
https://schema.org/isbn	80-8040-195-0
http://localhost/t...ganizacniJednotka	13430

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