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  • In the contribution the processes taking part during the interaction of electronegative plasma with immersed solids are studied by the combination of experimental approach and computer modelling. During the simulation two techniques were used - macroscopic kinetic approach for the determination of plasma composition and hybrid particle modelling for the study of sheath properties. Both the measurement and simulation was performed in the oxygen-argon plasma. The main attention was devoted to the dynamicsof sheath formation and to the visualisation of movement of charged particles in plasma.
  • In the contribution the processes taking part during the interaction of electronegative plasma with immersed solids are studied by the combination of experimental approach and computer modelling. During the simulation two techniques were used - macroscopic kinetic approach for the determination of plasma composition and hybrid particle modelling for the study of sheath properties. Both the measurement and simulation was performed in the oxygen-argon plasma. The main attention was devoted to the dynamicsof sheath formation and to the visualisation of movement of charged particles in plasma. (en)
Title
  • Study of plasma-solid interaction in electronegative plasma
  • Study of plasma-solid interaction in electronegative plasma (en)
skos:prefLabel
  • Study of plasma-solid interaction in electronegative plasma
  • Study of plasma-solid interaction in electronegative plasma (en)
skos:notation
  • RIV/44555601:13430/03:00002291!RIV/2004/MSM/134304/N
http://linked.open.../vavai/riv/strany
  • 101-103
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 113200002), Z(MSM 134300001)
http://linked.open...iv/cisloPeriodika
  • 307-suppl.
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 629581
http://linked.open...ai/riv/idVysledku
  • RIV/44555601:13430/03:00002291
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • plasma-solid interaction, particle modelling, negative ions, sheath dynamics (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • FR - Francouzská republika
http://linked.open...ontrolniKodProRIV
  • [6708964A7910]
http://linked.open...i/riv/nazevZdroje
  • La Vide
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 58
http://linked.open...iv/tvurceVysledku
  • Hrach, Rudolf
  • Šimek, J.
  • Hrachová, V.
  • Vicher, Miroslav
  • Sedlák, Dalibor
http://linked.open...n/vavai/riv/zamer
issn
  • 1266-0167
number of pages
http://localhost/t...ganizacniJednotka
  • 13430
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