About: Investigations of SnO2 thin films prepared by plasma oxidation.

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Investigations of SnO2 thin films prepared by plasma oxidation. Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this work, we have studied properties of SnO2 thin films produced by thermal evaporation of Sn films followed by in situ plasma oxidation. The layer properties were studied by atomic force microscopy, Rutherford backscattering spectrometry and X-ray photoelectron spectroscopy. The surface morphology of the tin films is characterized with a near flat-grain structure appearance and a root mean square rougness Rq - 12 nm. The typical grain size of the tin films was about 0,5 um. Surface morphology of the tin dioxide is characterized by a sharper grain structure with a higher roughness Rq - 14 nm.Th etypical grain size was about 0,2 um in this case. The SnO2 films prepared by plasma oxidation at long oxidation times led to a higher thickness of oxide layers and it varied from 37 to 65 nm when oxidation time varied from 10 and 20 min. This work gives information about the feasibility of presented diagnostic methods for characterization of SnO2 thin films prepared by plasma oxidation. In this work, we have studied properties of SnO2 thin films produced by thermal evaporation of Sn films followed by in situ plasma oxidation. The layer properties were studied by atomic force microscopy, Rutherford backscattering spectrometry and X-ray photoelectron spectroscopy. The surface morphology of the tin films is characterized with a near flat-grain structure appearance and a root mean square rougness Rq - 12 nm. The typical grain size of the tin films was about 0,5 um. Surface morphology of the tin dioxide is characterized by a sharper grain structure with a higher roughness Rq - 14 nm.Th etypical grain size was about 0,2 um in this case. The SnO2 films prepared by plasma oxidation at long oxidation times led to a higher thickness of oxide layers and it varied from 37 to 65 nm when oxidation time varied from 10 and 20 min. This work gives information about the feasibility of presented diagnostic methods for characterization of SnO2 thin films prepared by plasma oxidation. (en)
Title	Investigations of SnO2 thin films prepared by plasma oxidation. Investigations of SnO2 thin films prepared by plasma oxidation. (en)
skos:prefLabel	Investigations of SnO2 thin films prepared by plasma oxidation. Investigations of SnO2 thin films prepared by plasma oxidation. (en)
skos:notation	RIV/44555601:13430/02:00001973!RIV/2003/MSM/134303/N
http://linked.open.../vavai/riv/strany	665-671
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(LI200068), P(OC 527.50), Z(MSM 134300001)
http://linked.open...iv/cisloPeriodika	3
http://linked.open...vai/riv/dodaniDat	2003
http://linked.open...aciTvurceVysledku	Pavlík, Jaroslav Macková, Anna Novák, Stanislav Strýhal, Zdeněk
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Univerzita Jana Evangelisty Purkyně v Ústí nad Labem / Pedagogická fakulta
http://linked.open...dnocenehoVysledku	649698
http://linked.open...ai/riv/idVysledku	RIV/44555601:13430/02:00001973
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	SnO2 thin film, Plasma oxidation, AFM, RBS, XPS, sensor (en)
http://linked.open.../riv/klicoveSlovo	Plasma oxidation sensor AFM XPS RBS SnO2 thin film
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[73C1E5D2B8CC]
http://linked.open...i/riv/nazevZdroje	Vacuum
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...vavai/riv/projekt	Information sources for research teams of Faculty of Education, J. E. Purkyně University http://linked.opendata.cz/resource/domain/vavai/projekt/OC%20527.50
http://linked.open...UplatneniVysledku	2002
http://linked.open...v/svazekPeriodika	67
http://linked.open...iv/tvurceVysledku	Macková, Anna Pavlík, Jaroslav Novák, Stanislav Strýhal, Zdeněk Veltruská, K. Peřina, Václav
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20134300001
issn	0042-207X
number of pages	7 (xsd:int)
http://localhost/t...ganizacniJednotka	13430

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 110 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software