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Description
| - The SnO2 thin films are widely used for gas sensor applications. In this work we have studied properties of SnO2 thin films produced by thermal evaporation of Sn films followed by in situ plasma oxidation. The structure of such SnO2 films and also their chemical and physical properties depend on parameters governing the growth of these films during plasma oxidation, e.g. on both the plasma parameters and the substrate temperature. The effects of annealing modification of SnO2 films on the surface structure, composition, and electrical conductance of SnO2 films were studied.
- The SnO2 thin films are widely used for gas sensor applications. In this work we have studied properties of SnO2 thin films produced by thermal evaporation of Sn films followed by in situ plasma oxidation. The structure of such SnO2 films and also their chemical and physical properties depend on parameters governing the growth of these films during plasma oxidation, e.g. on both the plasma parameters and the substrate temperature. The effects of annealing modification of SnO2 films on the surface structure, composition, and electrical conductance of SnO2 films were studied. (en)
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Title
| - Atomic force microscopy study of SnO2 thin films for gas sensor
- Atomic force microscopy study of SnO2 thin films for gas sensor (en)
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skos:prefLabel
| - Atomic force microscopy study of SnO2 thin films for gas sensor
- Atomic force microscopy study of SnO2 thin films for gas sensor (en)
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skos:notation
| - RIV/44555601:13430/02:00001972!RIV/2003/MSM/134303/N
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(OC 527.50), Z(MSM 134300001)
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/44555601:13430/02:00001972
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - SnO2 thin films, Gas sensors, plasma oxidation, AFM, SIMS (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...v/mistoKonaniAkce
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http://linked.open...i/riv/mistoVydani
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http://linked.open...i/riv/nazevZdroje
| - National Conference NANO 02
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...ocetUcastnikuAkce
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http://linked.open...nichUcastnikuAkce
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Pavlík, Jaroslav
- Novák, Stanislav
- Strýhal, Zdeněk
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http://linked.open...vavai/riv/typAkce
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http://linked.open.../riv/zahajeniAkce
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http://linked.open...n/vavai/riv/zamer
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number of pages
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http://purl.org/ne...btex#hasPublisher
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https://schema.org/isbn
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http://localhost/t...ganizacniJednotka
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