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Description
| - The SnO2 thin films are widely used for gas sensor applications. In this work wi have studied properties of SnO2 thin films produced by a thermal evaporation of Sn films followed by an in situ plasma oxidation. The structure of such SnO2 films and also their chemical and physical properties depend on paramenters governing the growth of these films during plasma oxidation, e.g. both on the plasma parameters and the substrate temperature. The effects of annealing modification of SnO2 films on the surface structure , composition, and electrical conductance of SnO2 films were studied.
- The SnO2 thin films are widely used for gas sensor applications. In this work wi have studied properties of SnO2 thin films produced by a thermal evaporation of Sn films followed by an in situ plasma oxidation. The structure of such SnO2 films and also their chemical and physical properties depend on paramenters governing the growth of these films during plasma oxidation, e.g. both on the plasma parameters and the substrate temperature. The effects of annealing modification of SnO2 films on the surface structure , composition, and electrical conductance of SnO2 films were studied. (en)
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Title
| - Atomic Force Microscopy of SnO2 Thin Films for Gas Sensor
- Atomic Force Microscopy of SnO2 Thin Films for Gas Sensor (en)
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skos:prefLabel
| - Atomic Force Microscopy of SnO2 Thin Films for Gas Sensor
- Atomic Force Microscopy of SnO2 Thin Films for Gas Sensor (en)
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skos:notation
| - RIV/44555601:13430/02:00001971!RIV/2003/MSM/134303/N
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(OC 527.50), Z(MSM 134300001)
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/44555601:13430/02:00001971
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - SnO2 thin films, gas sensors, Plasma oxidation, AFM, RBS, XPS (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...v/mistoKonaniAkce
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http://linked.open...i/riv/mistoVydani
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http://linked.open...i/riv/nazevZdroje
| - Nano 02 National Conference
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...ocetUcastnikuAkce
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http://linked.open...nichUcastnikuAkce
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Pavlík, Jaroslav
- Novák, Stanislav
- Strýhal, Zdeněk
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http://linked.open...vavai/riv/typAkce
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http://linked.open.../riv/zahajeniAkce
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http://linked.open...n/vavai/riv/zamer
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number of pages
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http://purl.org/ne...btex#hasPublisher
| - Akademické nakladatelství CERM
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https://schema.org/isbn
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http://localhost/t...ganizacniJednotka
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