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  • The SnO2 thin films are widely used for gas sensor applications. In this work wi have studied properties of SnO2 thin films produced by a thermal evaporation of Sn films followed by an in situ plasma oxidation. The structure of such SnO2 films and also their chemical and physical properties depend on paramenters governing the growth of these films during plasma oxidation, e.g. both on the plasma parameters and the substrate temperature. The effects of annealing modification of SnO2 films on the surface structure , composition, and electrical conductance of SnO2 films were studied.
  • The SnO2 thin films are widely used for gas sensor applications. In this work wi have studied properties of SnO2 thin films produced by a thermal evaporation of Sn films followed by an in situ plasma oxidation. The structure of such SnO2 films and also their chemical and physical properties depend on paramenters governing the growth of these films during plasma oxidation, e.g. both on the plasma parameters and the substrate temperature. The effects of annealing modification of SnO2 films on the surface structure , composition, and electrical conductance of SnO2 films were studied. (en)
Title
  • Atomic Force Microscopy of SnO2 Thin Films for Gas Sensor
  • Atomic Force Microscopy of SnO2 Thin Films for Gas Sensor (en)
skos:prefLabel
  • Atomic Force Microscopy of SnO2 Thin Films for Gas Sensor
  • Atomic Force Microscopy of SnO2 Thin Films for Gas Sensor (en)
skos:notation
  • RIV/44555601:13430/02:00001971!RIV/2003/MSM/134303/N
http://linked.open.../vavai/riv/strany
  • 93
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(OC 527.50), Z(MSM 134300001)
http://linked.open...vai/riv/dodaniDat
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  • 639151
http://linked.open...ai/riv/idVysledku
  • RIV/44555601:13430/02:00001971
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • SnO2 thin films, gas sensors, Plasma oxidation, AFM, RBS, XPS (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [798D0B3F069C]
http://linked.open...v/mistoKonaniAkce
  • Brno
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  • Brno
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  • Nano 02 National Conference
http://linked.open...in/vavai/riv/obor
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http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Pavlík, Jaroslav
  • Novák, Stanislav
  • Strýhal, Zdeněk
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
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  • Akademické nakladatelství CERM
https://schema.org/isbn
  • 80-7204-258-0
http://localhost/t...ganizacniJednotka
  • 13430
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