About: Plasma Oxidation of Thin Metal Films

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Plasma oxidation, utilising oxygen or oxygen/argon plasma, is one of the low temperature techniques used to grow of dielectric films on metal and semiconductor surfaces. In this work, we have studied surface properties of Al2O3 and SnO2 thin films prepared by plasma oxidation. The oxidPe surface structure was measured by Atomic Force Microscopy (AFM). The composition, thickness and stoichiometry of oxide films were measured by Rutherford Backscattering Spectrometry (RBS). The experimental techniques arecombined with computer experiment, which was used in order to discuss the importance of various physical and chemical processes taking part during the plasma oxidation of metals. This computer experiment consists of set of models following various stage s of real experiment. Plasma oxidation, utilising oxygen or oxygen/argon plasma, is one of the low temperature techniques used to grow of dielectric films on metal and semiconductor surfaces. In this work, we have studied surface properties of Al2O3 and SnO2 thin films prepared by plasma oxidation. The oxidPe surface structure was measured by Atomic Force Microscopy (AFM). The composition, thickness and stoichiometry of oxide films were measured by Rutherford Backscattering Spectrometry (RBS). The experimental techniques arecombined with computer experiment, which was used in order to discuss the importance of various physical and chemical processes taking part during the plasma oxidation of metals. This computer experiment consists of set of models following various stage s of real experiment. (en)
Title	Plasma Oxidation of Thin Metal Films - Experiment and Modelling Plasma Oxidation of Thin Metal Films - Experiment and Modelling (en)
skos:prefLabel	Plasma Oxidation of Thin Metal Films - Experiment and Modelling Plasma Oxidation of Thin Metal Films - Experiment and Modelling (en)
skos:notation	RIV/44555601:13430/02:00001952!RIV/2003/MSM/134303/N
http://linked.open.../vavai/riv/strany	351-352
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(OC 527.50)
http://linked.open...vai/riv/dodaniDat	2003
http://linked.open...aciTvurceVysledku	Vicher, Miroslav Pavlík, Jaroslav Hrach, Rudolf Macková, Anna Strýhal, Zdeněk
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Univerzita Jana Evangelisty Purkyně v Ústí nad Labem / Pedagogická fakulta
http://linked.open...dnocenehoVysledku	658400
http://linked.open...ai/riv/idVysledku	RIV/44555601:13430/02:00001952
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Plasma oxidation of tin and aluminium thin films , AFM, RBS, computer modeling (en)
http://linked.open.../riv/klicoveSlovo	AFM RBS Plasma oxidation of tin and aluminium thin films computer modeling
http://linked.open...ontrolniKodProRIV	[EE0C3923EFFE]
http://linked.open...v/mistoKonaniAkce	Grenoble, Francie
http://linked.open...i/riv/mistoVydani	Grenoble, Francie
http://linked.open...i/riv/nazevZdroje	Conference Proceedings of Joint Conference ESCAMPIG 16
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...vavai/riv/projekt	http://linked.opendata.cz/resource/domain/vavai/projekt/OC%20527.50
http://linked.open...UplatneniVysledku	2002
http://linked.open...iv/tvurceVysledku	Hrach, Rudolf Macková, Anna Pavlík, Jaroslav Strýhal, Zdeněk Vicher, Miroslav Peřina, Václav
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2002-07-14 (xsd:date)
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Centre national de la recherche scientifique
http://localhost/t...ganizacniJednotka	13430

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