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Description
| - In this work, we have studied surface properties of SnO2 thin films produced by thermal evaporation of Sn films followed by in situ plasma oxidation. The dependence of surface properties on technological parameters was studied by Atomic Force Microscopy (AFM). The experimental results describe the dependence of surface topology on substrate properties, on evaporating conditions and on parameters of plasma oxidation (e.g. plasma parameters, oxidation time and voltage bias applied to the substrate during oxidation).
- In this work, we have studied surface properties of SnO2 thin films produced by thermal evaporation of Sn films followed by in situ plasma oxidation. The dependence of surface properties on technological parameters was studied by Atomic Force Microscopy (AFM). The experimental results describe the dependence of surface topology on substrate properties, on evaporating conditions and on parameters of plasma oxidation (e.g. plasma parameters, oxidation time and voltage bias applied to the substrate during oxidation). (en)
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Title
| - AFM Investigations of SnO2 Thin Films Prepared by Plasma Oxidation
- AFM Investigations of SnO2 Thin Films Prepared by Plasma Oxidation (en)
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skos:prefLabel
| - AFM Investigations of SnO2 Thin Films Prepared by Plasma Oxidation
- AFM Investigations of SnO2 Thin Films Prepared by Plasma Oxidation (en)
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skos:notation
| - RIV/44555601:13430/01:00001470!RIV/2002/MSM/134302/N
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(OK 401), Z(MSM 134300001)
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/44555601:13430/01:00001470
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - Plasma oxidation, SnO2, AFM (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...v/mistoKonaniAkce
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http://linked.open...i/riv/mistoVydani
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http://linked.open...i/riv/nazevZdroje
| - Proc. 7th European Vacuum Conference and 3rd European Topical Conference on Hard Coiatings - EVC - 7 and ETCH - 3
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...ocetUcastnikuAkce
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http://linked.open...nichUcastnikuAkce
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Pavlík, Jaroslav
- Novák, Stanislav
- Strýhal, Zdeněk
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http://linked.open...vavai/riv/typAkce
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http://linked.open.../riv/zahajeniAkce
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http://linked.open...n/vavai/riv/zamer
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number of pages
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http://purl.org/ne...btex#hasPublisher
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http://localhost/t...ganizacniJednotka
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