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  • In this work, we have studied surface properties of SnO2 thin films produced by thermal evaporation of Sn films followed by in situ plasma oxidation. The dependence of surface properties on technological parameters was studied by Atomic Force Microscopy (AFM). The experimental results describe the dependence of surface topology on substrate properties, on evaporating conditions and on parameters of plasma oxidation (e.g. plasma parameters, oxidation time and voltage bias applied to the substrate during oxidation).
  • In this work, we have studied surface properties of SnO2 thin films produced by thermal evaporation of Sn films followed by in situ plasma oxidation. The dependence of surface properties on technological parameters was studied by Atomic Force Microscopy (AFM). The experimental results describe the dependence of surface topology on substrate properties, on evaporating conditions and on parameters of plasma oxidation (e.g. plasma parameters, oxidation time and voltage bias applied to the substrate during oxidation). (en)
Title
  • AFM Investigations of SnO2 Thin Films Prepared by Plasma Oxidation
  • AFM Investigations of SnO2 Thin Films Prepared by Plasma Oxidation (en)
skos:prefLabel
  • AFM Investigations of SnO2 Thin Films Prepared by Plasma Oxidation
  • AFM Investigations of SnO2 Thin Films Prepared by Plasma Oxidation (en)
skos:notation
  • RIV/44555601:13430/01:00001470!RIV/2002/MSM/134302/N
http://linked.open.../vavai/riv/strany
  • 101
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(OK 401), Z(MSM 134300001)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 672667
http://linked.open...ai/riv/idVysledku
  • RIV/44555601:13430/01:00001470
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Plasma oxidation, SnO2, AFM (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [AC21A3B41254]
http://linked.open...v/mistoKonaniAkce
  • Madrid
http://linked.open...i/riv/mistoVydani
  • Madrid
http://linked.open...i/riv/nazevZdroje
  • Proc. 7th European Vacuum Conference and 3rd European Topical Conference on Hard Coiatings - EVC - 7 and ETCH - 3
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Pavlík, Jaroslav
  • Novák, Stanislav
  • Strýhal, Zdeněk
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Aseva
http://localhost/t...ganizacniJednotka
  • 13430
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