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rdf:type
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Description
| - The application of the chromatic sensing for monitoring of a microwave plasma source is described. The emitted radiation from the plasma excited in the argon, oxygen and CF4 mixture was measured with three PIN - diodes with integrated optical filters. The response of the chromatics signals on variation of the power and gas composition was investigated. Whereas a good sensitivity of the integrated optical signal to the power was confirmed, only a limited sensitivity to the working gas mixture was found.
- The application of the chromatic sensing for monitoring of a microwave plasma source is described. The emitted radiation from the plasma excited in the argon, oxygen and CF4 mixture was measured with three PIN - diodes with integrated optical filters. The response of the chromatics signals on variation of the power and gas composition was investigated. Whereas a good sensitivity of the integrated optical signal to the power was confirmed, only a limited sensitivity to the working gas mixture was found. (en)
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Title
| - Chromatic Monitoring of DownstreamMicrowave Plasma Source
- Chromatic Monitoring of DownstreamMicrowave Plasma Source (en)
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skos:prefLabel
| - Chromatic Monitoring of DownstreamMicrowave Plasma Source
- Chromatic Monitoring of DownstreamMicrowave Plasma Source (en)
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skos:notation
| - RIV/44555601:13430/00:00000566!RIV/2001/MSM/134301/N
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(OC 527.50), P(OK 401), Z(MSM 124100004), Z(MSM 134300001), Z(MSM 242100002)
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/44555601:13430/00:00000566
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http://linked.open...riv/jazykVysledku
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
| - Czechoslovak Journal of Physics
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Pavlík, Jaroslav
- Šerý, M.
- Špatenka, P.
- Messelhäuser, J.
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http://linked.open...n/vavai/riv/zamer
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issn
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number of pages
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http://localhost/t...ganizacniJednotka
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