About: Chromatic Monitoring as a PlasmaDiagnostic Technique: Application in Technological Process     Goto   Sponge   NotDistinct   Permalink

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Description
  • This paper describes the application of the chromatic monitoring both laboratory and industrial plasmas. The light emitted from the nitrogen plasma generated in the different plasma sources was measured with the imaging spectrograph. The emission spectrawere reduced into data points representing the chromatic coordinates of these spectra. The data compression makes this method attractive for monitoring plasma parameters changes. The aim of this work was to test the possibility of application of chroma tic monitoring method for the plasma processing industry.
  • This paper describes the application of the chromatic monitoring both laboratory and industrial plasmas. The light emitted from the nitrogen plasma generated in the different plasma sources was measured with the imaging spectrograph. The emission spectrawere reduced into data points representing the chromatic coordinates of these spectra. The data compression makes this method attractive for monitoring plasma parameters changes. The aim of this work was to test the possibility of application of chroma tic monitoring method for the plasma processing industry. (en)
Title
  • Chromatic Monitoring as a PlasmaDiagnostic Technique: Application in Technological Process
  • Chromatic Monitoring as a PlasmaDiagnostic Technique: Application in Technological Process (en)
skos:prefLabel
  • Chromatic Monitoring as a PlasmaDiagnostic Technique: Application in Technological Process
  • Chromatic Monitoring as a PlasmaDiagnostic Technique: Application in Technological Process (en)
skos:notation
  • RIV/44555601:13430/00:00000562!RIV/2001/MSM/134301/N
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(OC 527.50), P(OK 401), Z(MSM 134300001)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
  • Pavlík, Jaroslav
  • Strýhal, Zdeněk
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 706789
http://linked.open...ai/riv/idVysledku
  • RIV/44555601:13430/00:00000562
http://linked.open...riv/jazykVysledku
http://linked.open...ontrolniKodProRIV
  • [8A1E27732B3A]
http://linked.open...i/riv/mistoVydani
  • Paris
http://linked.open...vEdiceCisloSvazku
  • 14th International Conference on Surface Modificat
http://linked.open...telVyzkumneZpravy
  • Société Francaise de Métallurgie et de Matériaux
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Pavlík, Jaroslav
  • Špatenka, P.
  • Strýhal, Zdeněk
  • Hrachová, V.
  • Kanka, A.
http://linked.open...n/vavai/riv/zamer
number of pages
http://localhost/t...ganizacniJednotka
  • 13430
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