About: AFM Study of Al2O3 Thin Films Prepared by Plasma Oxidation     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • The surface structure features of Al2O3 thin films, which were prepared by plasma oxidation of aluminium thin films, were observed using atomic force microscopy (AFM). The alumina thin films were prepared at different sample bias voltages for demonstration of the preparation condition influence. It was found that the value of sample bias voltage plays an indispensable role for surface structure of the alumina film. Structural properties of the Al2O3 films could be affected during preparation due to plasma particle bombardment. The thickness of Al, Al-Al2O3, and Al-Al2O3-Al structures was derived from the AFM images of surfaces with a mechanical scratch.
  • The surface structure features of Al2O3 thin films, which were prepared by plasma oxidation of aluminium thin films, were observed using atomic force microscopy (AFM). The alumina thin films were prepared at different sample bias voltages for demonstration of the preparation condition influence. It was found that the value of sample bias voltage plays an indispensable role for surface structure of the alumina film. Structural properties of the Al2O3 films could be affected during preparation due to plasma particle bombardment. The thickness of Al, Al-Al2O3, and Al-Al2O3-Al structures was derived from the AFM images of surfaces with a mechanical scratch. (en)
Title
  • AFM Study of Al2O3 Thin Films Prepared by Plasma Oxidation
  • AFM Study of Al2O3 Thin Films Prepared by Plasma Oxidation (en)
skos:prefLabel
  • AFM Study of Al2O3 Thin Films Prepared by Plasma Oxidation
  • AFM Study of Al2O3 Thin Films Prepared by Plasma Oxidation (en)
skos:notation
  • RIV/44555601:13430/00:00000560!RIV/2001/MSM/134301/N
http://linked.open.../vavai/riv/strany
  • 390
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(OC 527.50), Z(MSM 134300001)
http://linked.open...iv/cisloPeriodika
  • 295
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
  • Pavlík, Jaroslav
  • Novák, Stanislav
  • Strýhal, Zdeněk
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 704049
http://linked.open...ai/riv/idVysledku
  • RIV/44555601:13430/00:00000560
http://linked.open...riv/jazykVysledku
http://linked.open...ontrolniKodProRIV
  • [298E7A69823B]
http://linked.open...i/riv/nazevZdroje
  • Le Vide: science, technique et application
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • neuveden
http://linked.open...iv/tvurceVysledku
  • Pavlík, Jaroslav
  • Novák, Stanislav
  • Strýhal, Zdeněk
http://linked.open...n/vavai/riv/zamer
issn
  • 1266-0167
number of pages
http://localhost/t...ganizacniJednotka
  • 13430
Faceted Search & Find service v1.16.118 as of Jun 21 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software