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  • For a number of applications of plasma in surface processing it is helpful to know the nature and relative abundances of the neutral species present in the plasma. This is our case in the plasma oxidation process using oxygen/argon plasma. The analysis of plasma gas neutral species provides data for detailed study of plasma chemistry. This work deals with using quadrupole mass spectrometer (QMS) which is embodied in a residual gas analyser (RGA) or in an online gas analysis system to sample high pressure gasses. The system was used for the detection of neutral species effusing from discharge tube during plasma processing. In this case the gas pressure must be reduced from 10-1 - 1 torr range to 10-5 torr. We give a description of design that sort of pressure reduction system. To achieve a fast response time the pressure reduction system is pumped. From the active plasma zone a small amount of the process gas was extracted and transported through pressure reduction system to QMS. From the plasma extra
  • For a number of applications of plasma in surface processing it is helpful to know the nature and relative abundances of the neutral species present in the plasma. This is our case in the plasma oxidation process using oxygen/argon plasma. The analysis of plasma gas neutral species provides data for detailed study of plasma chemistry. This work deals with using quadrupole mass spectrometer (QMS) which is embodied in a residual gas analyser (RGA) or in an online gas analysis system to sample high pressure gasses. The system was used for the detection of neutral species effusing from discharge tube during plasma processing. In this case the gas pressure must be reduced from 10-1 - 1 torr range to 10-5 torr. We give a description of design that sort of pressure reduction system. To achieve a fast response time the pressure reduction system is pumped. From the active plasma zone a small amount of the process gas was extracted and transported through pressure reduction system to QMS. From the plasma extra (en)
Title
  • A Quadrupole Mass Spectrometry Method for Study of Neutral Species of Processing Plasma
  • A Quadrupole Mass Spectrometry Method for Study of Neutral Species of Processing Plasma (en)
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  • A Quadrupole Mass Spectrometry Method for Study of Neutral Species of Processing Plasma
  • A Quadrupole Mass Spectrometry Method for Study of Neutral Species of Processing Plasma (en)
skos:notation
  • RIV/44555601:13430/00:00000556!RIV/2001/MSM/134301/N
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(OC 527.50), P(OK 401), Z(MSM 134300001)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
  • Pavlík, Jaroslav
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
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  • 703675
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  • RIV/44555601:13430/00:00000556
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  • [ACD08D113E91]
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  • Pula
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  • 8th Joint Vacuum Conference
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  • Croatian Vacuum Society
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http://linked.open...vavai/riv/projekt
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http://linked.open...iv/tvurceVysledku
  • Pavlík, Jaroslav
  • Jelínek, T.
  • Hedbávný, P.
  • Bašta, R.
  • Kleger, V.
http://linked.open...n/vavai/riv/zamer
number of pages
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  • 13430
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