About: Anisotropic etching of silicon by TMAH

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
rdfs:seeAlso	http://csacg.fzu.cz/
Description	We have investigated the TMAH etch conditions of the Si(110) wafers. We present data on the etch rates of the {110} and {111} planes for different composition of the TMAH etchant. We further discuss the characteristics of the masks from both material and crystallographic orientation points of view, which are needed for successful micromachining. We have investigated the TMAH etch conditions of the Si(110) wafers. We present data on the etch rates of the {110} and {111} planes for different composition of the TMAH etchant. We further discuss the characteristics of the masks from both material and crystallographic orientation points of view, which are needed for successful micromachining. (en)
Title	Anisotropic etching of silicon by TMAH Anisotropic etching of silicon by TMAH (en)
skos:prefLabel	Anisotropic etching of silicon by TMAH Anisotropic etching of silicon by TMAH (en)
skos:notation	RIV/26821532:_____/11:#0000043!RIV13-MPO-26821532
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(FR-TI3/031)
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Kostelník, Petr
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	ON SEMICONDUCTOR CZECH REPUBLIC, s.r.o.
http://linked.open...dnocenehoVysledku	186301
http://linked.open...ai/riv/idVysledku	RIV/26821532:_____/11:#0000043
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Silicon; TMAH; MEMS; crystallographic planes; etching (en)
http://linked.open.../riv/klicoveSlovo	Silicon TMAH crystallographic planes etching MEMS
http://linked.open...ontrolniKodProRIV	[53D1FC34962A]
http://linked.open...v/mistoKonaniAkce	Kežmarské Žlaby, Slovensko
http://linked.open...i/riv/mistoVydani	Bratislava, Slovensko
http://linked.open...i/riv/nazevZdroje	Proceedings of the 21th Joint Seminar Development of Materials Science in Research and Education
http://linked.open...in/vavai/riv/obor	JJ
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	1 (xsd:int)
http://linked.open...vavai/riv/projekt	Research and Development of Technologies of Manufacturing of Novel Species of Silicon Wafers
http://linked.open...UplatneniVysledku	2011
http://linked.open...iv/tvurceVysledku	Kostelník, Petr
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2011-01-01 (xsd:date)
number of pages	85 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Slovak Society for Industrial Chemistry
https://schema.org/isbn	978-80-8134-002-4

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