About: Monomer deficient conditions used to control physical properties of plasma polymer films in wide ranges by RF power

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Monomer deficient conditions used to control physical properties of plasma polymer films in wide ranges by RF power Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We found out that the monomer deficient conditions enable to control mechanical and optical properties of plasma polymer films by RF power using plasma-enhanced chemical vapor deposition. The monomer deficient conditions may be characterized by the plasma process pressure (plasma switched on) lower than the basic process pressure (plasma switched off), which means that the concentration of reactive species is not insignificant or is even comparable with the concentration of monomer molecules. The monomer deficient conditions are achieved at lower monomer flow rates (0.5-10 sccm) operated at lower basic process pressures (1-5 Pa). In this study, we plasma polymerized tetravinylsilane at a mass flow rate of 3.8sccm operated at a basic process pressure of 3.0 Pa, and RF power ranging 10-70 W using continuous wave. The plasma process pressure decreased from 1.7 Pa (10 W) to 1.1 Pa (70 W) at enhanced power. The plasma species were monitored by mass spectrometry and correlated with chemical properties of de We found out that the monomer deficient conditions enable to control mechanical and optical properties of plasma polymer films by RF power using plasma-enhanced chemical vapor deposition. The monomer deficient conditions may be characterized by the plasma process pressure (plasma switched on) lower than the basic process pressure (plasma switched off), which means that the concentration of reactive species is not insignificant or is even comparable with the concentration of monomer molecules. The monomer deficient conditions are achieved at lower monomer flow rates (0.5-10 sccm) operated at lower basic process pressures (1-5 Pa). In this study, we plasma polymerized tetravinylsilane at a mass flow rate of 3.8sccm operated at a basic process pressure of 3.0 Pa, and RF power ranging 10-70 W using continuous wave. The plasma process pressure decreased from 1.7 Pa (10 W) to 1.1 Pa (70 W) at enhanced power. The plasma species were monitored by mass spectrometry and correlated with chemical properties of de (en)
Title	Monomer deficient conditions used to control physical properties of plasma polymer films in wide ranges by RF power Monomer deficient conditions used to control physical properties of plasma polymer films in wide ranges by RF power (en)
skos:prefLabel	Monomer deficient conditions used to control physical properties of plasma polymer films in wide ranges by RF power Monomer deficient conditions used to control physical properties of plasma polymer films in wide ranges by RF power (en)
skos:notation	RIV/00216305:26310/14:PU113720!RIV15-TA0-26310___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(GCP205/12/J058), P(TA01010796)
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Čech, Vladimír Hoferek, Lukáš Kontárová, Soňa Trivedi, Rutul Rajendra
http://linked.open.../riv/druhVysledku	O - Ostatní výsledky nezařaditelné do žádného z výše uvedených druhů výsledku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta chemická
http://linked.open...dnocenehoVysledku	30474
http://linked.open...ai/riv/idVysledku	RIV/00216305:26310/14:PU113720
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	thin films, plasma polymerization, optical properties, mechanical properties (en)
http://linked.open.../riv/klicoveSlovo	mechanical properties optical properties plasma polymerization thin films
http://linked.open...ontrolniKodProRIV	[2B1CF368C7BC]
http://linked.open...in/vavai/riv/obor	CF
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Anisotropic film synthesis by plasma nanotechnology Plasma nanotechnology used for high-performance composites
http://linked.open...UplatneniVysledku	2014
http://linked.open...iv/tvurceVysledku	Čech, Vladimír Hoferek, Lukáš Trivedi, Rutul Rajendra Kontárová, Soňa
http://localhost/t...ganizacniJednotka	26310

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 25 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software