About: In-situ Monitoring of Thin Film Depositon Process Using Optical Emission Spectroscopy     Goto   Sponge   NotDistinct   Permalink

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Description
  • Plasma enhanced chemical vapour deposition (PECVD) has become more and more popular for thin film deposition, especially using organosilicon precursors. This work focuses on high density films deposited by PECVD using hexamethyldisiloxane precursor. Optical emission spectroscopy was used for plasma diagnostics. Oxygen transmission rate and infrared spectra of deposited layers were measured. Optimal experimental conditions for low carbon content layers and layers with good barrier properties were determined.
  • Plasma enhanced chemical vapour deposition (PECVD) has become more and more popular for thin film deposition, especially using organosilicon precursors. This work focuses on high density films deposited by PECVD using hexamethyldisiloxane precursor. Optical emission spectroscopy was used for plasma diagnostics. Oxygen transmission rate and infrared spectra of deposited layers were measured. Optimal experimental conditions for low carbon content layers and layers with good barrier properties were determined. (en)
Title
  • In-situ Monitoring of Thin Film Depositon Process Using Optical Emission Spectroscopy
  • In-situ Monitoring of Thin Film Depositon Process Using Optical Emission Spectroscopy (en)
skos:prefLabel
  • In-situ Monitoring of Thin Film Depositon Process Using Optical Emission Spectroscopy
  • In-situ Monitoring of Thin Film Depositon Process Using Optical Emission Spectroscopy (en)
skos:notation
  • RIV/00216305:26310/12:PU99278!RIV13-MSM-26310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(DF11P01OVV004), S
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 142015
http://linked.open...ai/riv/idVysledku
  • RIV/00216305:26310/12:PU99278
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • PECVD, HMDSO, thin layers, barriere properties (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [E61A89E1C429]
http://linked.open...v/mistoKonaniAkce
  • Viana do Castelo
http://linked.open...i/riv/mistoVydani
  • Lisbon
http://linked.open...i/riv/nazevZdroje
  • Europhysics Conference Abstracts
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Krčma, František
  • Přikryl, Radek
  • Procházka, Michal
  • Blahová, Lucie
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
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  • EPS
https://schema.org/isbn
  • 2-914771-74-6
http://localhost/t...ganizacniJednotka
  • 26310
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