About: Thickness measurement of thin soft organic films

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Description	This paper compares chromatic white light (CWL) and interference microscope measurements aiming to find a proper non-contact method for a thickness determination of thin soft organic films. Standard samples with vacuum deposited aluminum films of different thicknesses in the range of 50-1000 nm were prepared and measured by both methods. It was found that the CWL technique is proper for a measurement of thin soft organic films with higher than 40-50 nm film thicknesses. As a complementary feature of the method 2D and 3D surface morphology imaging of the films could be recorded and the surface film roughness could be calculated. In a case of optical inhomogeneity the method requires covering with a uniform high reflective coating. The interference microscopy method results in a relatively lower film thickness with a higher standard deviation and a higher standard relative error. It could be connected with the resolution of the interferograms measured. This paper compares chromatic white light (CWL) and interference microscope measurements aiming to find a proper non-contact method for a thickness determination of thin soft organic films. Standard samples with vacuum deposited aluminum films of different thicknesses in the range of 50-1000 nm were prepared and measured by both methods. It was found that the CWL technique is proper for a measurement of thin soft organic films with higher than 40-50 nm film thicknesses. As a complementary feature of the method 2D and 3D surface morphology imaging of the films could be recorded and the surface film roughness could be calculated. In a case of optical inhomogeneity the method requires covering with a uniform high reflective coating. The interference microscopy method results in a relatively lower film thickness with a higher standard deviation and a higher standard relative error. It could be connected with the resolution of the interferograms measured. (en)
Title	Thickness measurement of thin soft organic films Thickness measurement of thin soft organic films (en)
skos:prefLabel	Thickness measurement of thin soft organic films Thickness measurement of thin soft organic films (en)
skos:notation	RIV/00216305:26310/12:PU103402!RIV15-MSM-26310___
http://linked.open...avai/riv/aktivita	O P
http://linked.open...avai/riv/aktivity	O, P(ED0012/01/01)
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Weiter, Martin Ohlídal, Miloslav Salyk, Ota Mladenova, Daniela Zhivkov, Ivaylo Siderov, Vasil
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta chemická
http://linked.open...dnocenehoVysledku	174343
http://linked.open...ai/riv/idVysledku	RIV/00216305:26310/12:PU103402
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	This soft organic films , Interference microscopy , Semiconductor device measurement , Surface morphology , Thickness measurement (en)
http://linked.open.../riv/klicoveSlovo	Interference microscopy Semiconductor device measurement Surface morphology Thickness measurement This soft organic films
http://linked.open...ontrolniKodProRIV	[66EFEFD8284A]
http://linked.open...v/mistoKonaniAkce	Bad Aussee
http://linked.open...i/riv/mistoVydani	Bad Aussee, Austria
http://linked.open...i/riv/nazevZdroje	Electronics Technology (ISSE), 2012 35th International Spring Seminar on
http://linked.open...in/vavai/riv/obor	CF
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	9 (xsd:int)
http://linked.open...vavai/riv/projekt	Centres for materials research at FCH BUT
http://linked.open...UplatneniVysledku	2012
http://linked.open...iv/tvurceVysledku	Mladenova, Daniela Salyk, Ota Weiter, Martin Zhivkov, Ivaylo Ohlídal, Miloslav Siderov, Vasil
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2012-05-09 (xsd:date)
number of pages	6 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Neuveden
https://schema.org/isbn	978-1-4673-2241-6
http://localhost/t...ganizacniJednotka	26310

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