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  • The inductively coupled low pressure plasma operating in continuous as well as in pulsed mode was used for the experiments. The aim of the presented experiment was to study the dimethylphenylsilane (DMPS) fragmentation, and the influence of set-up parameters on the deposition process. Fragments of DMPS were identified by optical emission spectroscopy. Dependences of fragment populations on supplied power as well as on DMPS pressure were determined, and consequently, the electron and rotational temperatures were calculated. Some optimal values of set-up parameters as DMPS pressure and duty cycle were found.
  • The inductively coupled low pressure plasma operating in continuous as well as in pulsed mode was used for the experiments. The aim of the presented experiment was to study the dimethylphenylsilane (DMPS) fragmentation, and the influence of set-up parameters on the deposition process. Fragments of DMPS were identified by optical emission spectroscopy. Dependences of fragment populations on supplied power as well as on DMPS pressure were determined, and consequently, the electron and rotational temperatures were calculated. Some optimal values of set-up parameters as DMPS pressure and duty cycle were found. (en)
Title
  • Spectroscopy of Plasma Deposition Processes Using Dimethylphenylsilane Precursor
  • Spectroscopy of Plasma Deposition Processes Using Dimethylphenylsilane Precursor (en)
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  • Spectroscopy of Plasma Deposition Processes Using Dimethylphenylsilane Precursor
  • Spectroscopy of Plasma Deposition Processes Using Dimethylphenylsilane Precursor (en)
skos:notation
  • RIV/00216305:26310/11:PU90913!RIV11-MSM-26310___
http://linked.open...avai/riv/aktivita
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  • S, Z(MSM0021630501)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 231395
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  • RIV/00216305:26310/11:PU90913
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  • Optical emission spectroscopy, organosilicons, thin film deposition, plasma diagnostics (en)
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  • [F7FCEB0F2335]
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  • Vrátna
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  • Bratislava
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  • Book of Contributed Papers: 18th Symposium on Application of Plasma Processes and Workshop on Plasmas as a Planetary Atmospheres Mimics
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  • Krčma, František
  • Přikryl, Radek
  • Procházka, Michal
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http://linked.open...n/vavai/riv/zamer
number of pages
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  • Neuveden
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  • 978-80-89186-77-8
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  • 26310
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