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  • Bilayers consisting of a-SiC:H and a-SiOC:H alloys were deposited on silicon wafer using plasma-enhanced chemical vapor deposition (PECVD). The layered structures were subjected to ellipsometric measurements that enabled us to distinguish individual layers and determine the layer thickness and its optical constants. In next study, single layer and multilayered a-SiC:H films, deposited from tetravinylsilane at different powers by PECVD, were investigated intensively by spectroscopic ellipsometry, nanoindentation, and atomic force microscopy (AFM) to compare optical and mechanical properties of the individual layer of decreased thickness (315 - 25 nm) with those of the corresponding single layer.
  • Bilayers consisting of a-SiC:H and a-SiOC:H alloys were deposited on silicon wafer using plasma-enhanced chemical vapor deposition (PECVD). The layered structures were subjected to ellipsometric measurements that enabled us to distinguish individual layers and determine the layer thickness and its optical constants. In next study, single layer and multilayered a-SiC:H films, deposited from tetravinylsilane at different powers by PECVD, were investigated intensively by spectroscopic ellipsometry, nanoindentation, and atomic force microscopy (AFM) to compare optical and mechanical properties of the individual layer of decreased thickness (315 - 25 nm) with those of the corresponding single layer. (en)
Title
  • Anisotropic film construction using plasma nanotechnology (atomic polymerization)
  • Anisotropic film construction using plasma nanotechnology (atomic polymerization) (en)
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  • Anisotropic film construction using plasma nanotechnology (atomic polymerization)
  • Anisotropic film construction using plasma nanotechnology (atomic polymerization) (en)
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  • RIV/00216305:26310/10:PU90078!RIV11-MSM-26310___
http://linked.open...avai/riv/aktivita
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  • P(KAN101120701), P(ME09061)
http://linked.open...vai/riv/dodaniDat
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  • 246968
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  • RIV/00216305:26310/10:PU90078
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  • plasma polymerization, thin films (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [7FB0A4ED1D90]
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http://linked.open...UplatneniVysledku
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  • Čech, Vladimír
  • Hoferek, Lukáš
  • Trivedi, Rutul Rajendra
  • Mistrík, Jan
http://localhost/t...ganizacniJednotka
  • 26310
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