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Description
| - Optické parametry plazmového polymeru připraveného z tetravinylsilanu (cs)
- We have focused on the optical properties of thin plasma-polymerized films deposited from a mixture of tetravinylsilane and oxygen gas and evaluated by means of spectroscopic ellipsometry. The RF effective power of pulsed plasma and the oxygen/total flow rate ratio were varied in broad range. We found a clear link between the RF effective power used and optical properties (refractive index, extinction coefficient, band gap) of the films.
- We have focused on the optical properties of thin plasma-polymerized films deposited from a mixture of tetravinylsilane and oxygen gas and evaluated by means of spectroscopic ellipsometry. The RF effective power of pulsed plasma and the oxygen/total flow rate ratio were varied in broad range. We found a clear link between the RF effective power used and optical properties (refractive index, extinction coefficient, band gap) of the films. (en)
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Title
| - Optical constants of plasma-polymerized tetravinylsilane films
- Optické parametry plazmového polymeru připraveného z tetravinylsilanu (cs)
- Optical constants of plasma-polymerized tetravinylsilane films (en)
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skos:prefLabel
| - Optical constants of plasma-polymerized tetravinylsilane films
- Optické parametry plazmového polymeru připraveného z tetravinylsilanu (cs)
- Optical constants of plasma-polymerized tetravinylsilane films (en)
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skos:notation
| - RIV/00216305:26310/07:PU70639!RIV08-GA0-26310___
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(1P05OC087), P(GA104/06/0437), P(KAN101120701), Z(MSM0021630501)
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/00216305:26310/07:PU70639
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - plasma polymerization, optical properties, ellipsometry (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...v/mistoKonaniAkce
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http://linked.open...i/riv/mistoVydani
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http://linked.open...i/riv/nazevZdroje
| - 18th International Symposium on Plasma Chemistry
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Studýnka, Jan
- Čech, Vladimír
- Čechalová, Božena
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http://linked.open...vavai/riv/typAkce
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http://linked.open.../riv/zahajeniAkce
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http://linked.open...n/vavai/riv/zamer
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number of pages
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http://purl.org/ne...btex#hasPublisher
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https://schema.org/isbn
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http://localhost/t...ganizacniJednotka
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