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rdf:type
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Description
| - Plasma-polymerized a-SiOC:H films were deposited from a mixture of tetravinylsilane vapor and oxygen gas at different power (0.1-10 W) and oxygen-to-total flow rate ratio (0-0.79). The Young's modulus, hardness, refractive index, extinction coefficient, and band gap of the plasma polymer were found to be controlled by the ratio between the content of carbon and oxygen atoms in films.
- Plasma-polymerized a-SiOC:H films were deposited from a mixture of tetravinylsilane vapor and oxygen gas at different power (0.1-10 W) and oxygen-to-total flow rate ratio (0-0.79). The Young's modulus, hardness, refractive index, extinction coefficient, and band gap of the plasma polymer were found to be controlled by the ratio between the content of carbon and oxygen atoms in films. (en)
- Fyzikální vs. chemické vlastnosti a-SiOC:H vrstev (cs)
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Title
| - Physical versus chemical properties of plasma-polymerized a-SiOC:H films
- Physical versus chemical properties of plasma-polymerized a-SiOC:H films (en)
- Fyzikální vs. chemické vlastnosti a-SiOC:H vrstev (cs)
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skos:prefLabel
| - Physical versus chemical properties of plasma-polymerized a-SiOC:H films
- Physical versus chemical properties of plasma-polymerized a-SiOC:H films (en)
- Fyzikální vs. chemické vlastnosti a-SiOC:H vrstev (cs)
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skos:notation
| - RIV/00216305:26310/07:PU70627!RIV08-GA0-26310___
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(1P05OC087), P(GA104/06/0437), P(KAN101120701), Z(MSM0021630501)
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/00216305:26310/07:PU70627
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - thin film, mechanical properties, optical properties, chemical properties (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...v/mistoKonaniAkce
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http://linked.open...i/riv/mistoVydani
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http://linked.open...i/riv/nazevZdroje
| - 18th International Symposium on Plasma Chemistry
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Studýnka, Jan
- Čech, Vladimír
- Peřina, Vratislav
- Zemek, Josef
- Čechalová, Božena
- Jones, Frank
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http://linked.open...vavai/riv/typAkce
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http://linked.open.../riv/zahajeniAkce
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http://linked.open...n/vavai/riv/zamer
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number of pages
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http://purl.org/ne...btex#hasPublisher
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https://schema.org/isbn
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http://localhost/t...ganizacniJednotka
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