About: Physico-chemical properties of plasma-polymerized tetravinylsilane

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Plasma polymer films of tetravinylsilane were deposited on silicon wafers using an RF glow discharge operated in pulsed mode. Microscopic and spectroscopic techniques revealed that physico-chemical properties of plasma polymer depend on the effective power used if the flow rate was constant. The deposition rate (8 - 165 nm min-1) and surface roughness (2.0 - 5.8 nm) of films varied with the RF power. An organic/inorganic character (C/Si ratio) of films and a content of vinyl groups could be controlled by the effective power. The refractive index of films increased with power from 1.63 (0.05 W) to 1.75 (10 W) at a wavelength of 633 nm and the extinction coefficient rose sharply with the power from 0.09 (0.05 W) to 0.37 (10 W) at a wavelength of 240 nm. The elastic modulus and hardness of plasma polymer could be varied from 11 GPa (0.05 W) to 30 GPa (10 W) and from 1.4 to 5.9 GPa, respectively. Plasma polymer films of tetravinylsilane were deposited on silicon wafers using an RF glow discharge operated in pulsed mode. Microscopic and spectroscopic techniques revealed that physico-chemical properties of plasma polymer depend on the effective power used if the flow rate was constant. The deposition rate (8 - 165 nm min-1) and surface roughness (2.0 - 5.8 nm) of films varied with the RF power. An organic/inorganic character (C/Si ratio) of films and a content of vinyl groups could be controlled by the effective power. The refractive index of films increased with power from 1.63 (0.05 W) to 1.75 (10 W) at a wavelength of 633 nm and the extinction coefficient rose sharply with the power from 0.09 (0.05 W) to 0.37 (10 W) at a wavelength of 240 nm. The elastic modulus and hardness of plasma polymer could be varied from 11 GPa (0.05 W) to 30 GPa (10 W) and from 1.4 to 5.9 GPa, respectively. (en)
Title	Physico-chemical properties of plasma-polymerized tetravinylsilane Physico-chemical properties of plasma-polymerized tetravinylsilane (en)
skos:prefLabel	Physico-chemical properties of plasma-polymerized tetravinylsilane Physico-chemical properties of plasma-polymerized tetravinylsilane (en)
skos:notation	RIV/00216305:26310/07:PU70613!RIV10-MSM-26310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(1P05OC087), P(GA104/03/0236), P(OC 527.110), Z(AV0Z10480505)
http://linked.open...iv/cisloPeriodika	10
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Čech, Vladimír Studýnka, Jan
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta chemická
http://linked.open...dnocenehoVysledku	441332
http://linked.open...ai/riv/idVysledku	RIV/00216305:26310/07:PU70613
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Nano-indentation, Atomic force microscopy (AFM), Ellipsometry, Infrared spectroscopy, Rutherford backscattering spectroscopy, PACVD (en)
http://linked.open.../riv/klicoveSlovo	Atomic force microscopy (AFM) Nano-indentation Rutherford backscattering spectroscopy PACVD Infrared spectroscopy Ellipsometry
http://linked.open...odStatuVydavatele	CZ - Česká republika
http://linked.open...ontrolniKodProRIV	[93D938D8CC7C]
http://linked.open...i/riv/nazevZdroje	Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor	CF
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Structuring of plasma polymers http://linked.opendata.cz/resource/domain/vavai/projekt/OC%20527.110 Optimised interphase in glass fibre/polyester composite system
http://linked.open...UplatneniVysledku	2007
http://linked.open...v/svazekPeriodika	201
http://linked.open...iv/tvurceVysledku	Studýnka, Jan Čech, Vladimír Peřina, Vratislav Conte, Nicolas
http://linked.open...n/vavai/riv/zamer	Jaderná fyzika a příbuzné obory v základním, aplikovaném a interdisciplinárním výzkumu
issn	0257-8972
number of pages	6 (xsd:int)
http://localhost/t...ganizacniJednotka	26310

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