About: Spectroscopic Observation of Low Pressure Plasma Deposition of Thin Silane and Siloxane Based Films     Goto   Sponge   NotDistinct   Permalink

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Description
  • The main part of this work is focused on the identification of the spectra measured during the plasma deposition using the vinyltriethoxysilane in a continual regime and also in a pulsed regime with the varied relative pulse duration and during deposition with an amount of oxygen added in various ratios. The next part is focused on spectroscopic observation during the plasma deposition using the hexamethyldisiloxane and ?×-metacryloxyprophyltrimethoxysilane.
  • The main part of this work is focused on the identification of the spectra measured during the plasma deposition using the vinyltriethoxysilane in a continual regime and also in a pulsed regime with the varied relative pulse duration and during deposition with an amount of oxygen added in various ratios. The next part is focused on spectroscopic observation during the plasma deposition using the hexamethyldisiloxane and ?×-metacryloxyprophyltrimethoxysilane. (en)
Title
  • Spectroscopic Observation of Low Pressure Plasma Deposition of Thin Silane and Siloxane Based Films
  • Spectroscopic Observation of Low Pressure Plasma Deposition of Thin Silane and Siloxane Based Films (en)
skos:prefLabel
  • Spectroscopic Observation of Low Pressure Plasma Deposition of Thin Silane and Siloxane Based Films
  • Spectroscopic Observation of Low Pressure Plasma Deposition of Thin Silane and Siloxane Based Films (en)
skos:notation
  • RIV/00216305:26310/03:PU38246!RIV/2004/MSM/263104/N
http://linked.open.../vavai/riv/strany
  • 1-6
http://linked.open...avai/riv/aktivita
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  • Z(MSM 263100019)
http://linked.open...vai/riv/dodaniDat
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  • 628164
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  • RIV/00216305:26310/03:PU38246
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  • Plasma thin layer deposition, organosilicone films, optical emission spectroscopy (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [D171B1D90B4D]
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  • Taormina
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  • Taormina
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  • Proceedings of ISPC XVI
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  • Krčma, František
  • Přikryl, Radek
  • Vaněk, Jan
  • Čech, Vladimír
  • Rašková, Zuzana
  • Šormová, Hana
  • Havelková, Iveta
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
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  • IUPAC
http://localhost/t...ganizacniJednotka
  • 26310
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