About: Spectroscopic Monitoring of Plasma Deposition of Silane and Siloxane Based Thin Films

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Spectroscopic Monitoring of Plasma Deposition of Silane and Siloxane Based Thin Films Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The spectroscopic studies have been focused on the basic characterization of the RF discharge conditions during the films deposition. In the discharge spectra many different species has been determined. To characterize the neutral gas temperature the small amount of nitrogen has been involved into the discharge. The dependencies of the temperature and the molecular excitations in the discharge have been initially studied on the total discharge power and gas composition. The correlation among the discharrge parameters and the final layer properties will be subject of the following studies. The spectroscopic studies have been focused on the basic characterization of the RF discharge conditions during the films deposition. In the discharge spectra many different species has been determined. To characterize the neutral gas temperature the small amount of nitrogen has been involved into the discharge. The dependencies of the temperature and the molecular excitations in the discharge have been initially studied on the total discharge power and gas composition. The correlation among the discharrge parameters and the final layer properties will be subject of the following studies. (en)
Title	Spectroscopic Monitoring of Plasma Deposition of Silane and Siloxane Based Thin Films Spectroscopic Monitoring of Plasma Deposition of Silane and Siloxane Based Thin Films (en)
skos:prefLabel	Spectroscopic Monitoring of Plasma Deposition of Silane and Siloxane Based Thin Films Spectroscopic Monitoring of Plasma Deposition of Silane and Siloxane Based Thin Films (en)
skos:notation	RIV/00216305:26310/03:PU38239!RIV/2004/MSM/263104/N
http://linked.open.../vavai/riv/strany	401-405
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM 263100019)
http://linked.open...iv/cisloPeriodika	5
http://linked.open...vai/riv/dodaniDat	2004
http://linked.open...aciTvurceVysledku	Vaněk, Jan Kolářová Rašková, Zuzana Přikryl, Radek Šormová, Hana Čech, Vladimír Burianová, Iveta Krčma, František
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta chemická
http://linked.open...dnocenehoVysledku	628163
http://linked.open...ai/riv/idVysledku	RIV/00216305:26310/03:PU38239
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Plasma deposition, organosilicone layers, optical emission spectroscopy (en)
http://linked.open.../riv/klicoveSlovo	Plasma deposition optical emission spectroscopy organosilicone layers
http://linked.open...odStatuVydavatele	SK - Slovenská republika
http://linked.open...ontrolniKodProRIV	[974BA1EF69C5]
http://linked.open...i/riv/nazevZdroje	Acta Physica Slovaca
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	7 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...UplatneniVysledku	2003
http://linked.open...v/svazekPeriodika	53
http://linked.open...iv/tvurceVysledku	Krčma, František Přikryl, Radek Vaněk, Jan Čech, Vladimír Rašková, Zuzana Šormová, Hana Havelková, Iveta
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20263100019
issn	0323-0465
number of pages	5 (xsd:int)
http://localhost/t...ganizacniJednotka	26310

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 25 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software