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Description
  • The study deals with the vacuum evaporation technique of thin layers, considering different process parameters and their influence on electrical properties. Parameters, such as temperature, different substrate types, substrate vibrations, etc., are considered. The effects of the process parameters on the coating structure are observed. The temperature affects the coating quality and stability [1] [2]. Regarding electrical properties, the surface resistivity is measured by four-point method, whereas the influence of process parameters on the surface resistivity is determined as well.
  • The study deals with the vacuum evaporation technique of thin layers, considering different process parameters and their influence on electrical properties. Parameters, such as temperature, different substrate types, substrate vibrations, etc., are considered. The effects of the process parameters on the coating structure are observed. The temperature affects the coating quality and stability [1] [2]. Regarding electrical properties, the surface resistivity is measured by four-point method, whereas the influence of process parameters on the surface resistivity is determined as well. (en)
Title
  • Mechanical and electrical properties of evaporated thin layers
  • Mechanical and electrical properties of evaporated thin layers (en)
skos:prefLabel
  • Mechanical and electrical properties of evaporated thin layers
  • Mechanical and electrical properties of evaporated thin layers (en)
skos:notation
  • RIV/00216305:26220/14:PU113911!RIV15-MSM-26220___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • S
http://linked.open...iv/cisloPeriodika
  • 3
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 28029
http://linked.open...ai/riv/idVysledku
  • RIV/00216305:26220/14:PU113911
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • thin layers vacuum evaporation mechanical properties electrical properties electrical measurements (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CZ - Česká republika
http://linked.open...ontrolniKodProRIV
  • [EA0C73BC1773]
http://linked.open...i/riv/nazevZdroje
  • ElectroScope - http://www.electroscope.zcu.cz
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 2014
http://linked.open...iv/tvurceVysledku
  • Yahya, Doaa
  • Šandera, Josef
  • Vejmola, Tomáš
issn
  • 1802-4564
number of pages
http://localhost/t...ganizacniJednotka
  • 26220
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