About: Comparison of Aluminum Oxide Layers Deposited by PECVD and Pulsed Magnetron Sputtering for Dielectric Rear Side Passivation of Crystalline Silicon Solar Cells

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About: Comparison of Aluminum Oxide Layers Deposited by PECVD and Pulsed Magnetron Sputtering for Dielectric Rear Side Passivation of Crystalline Silicon Solar Cells Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The aim of our work is to test other alternative technologies available in the Solartec's research laboratory. There are a standard PECVD technology and a unique OKS („Otto Klobe und Sohn“) sputtering system, specially developed for photovoltaic applications. Sputtering system OKS is based on a batch process for 36 of 5“ Si substrates, where very good homogeneity of dielectric layers (2%) is achieved. OKS sputtering equipment was specially developed for the pilot plant in order to create a viable alternative to existing PECVD and opportunities for a wider use of the system, especially for the formation of multilayer dielectric films suitable for colored solar cells. The aim of our work is to test other alternative technologies available in the Solartec's research laboratory. There are a standard PECVD technology and a unique OKS („Otto Klobe und Sohn“) sputtering system, specially developed for photovoltaic applications. Sputtering system OKS is based on a batch process for 36 of 5“ Si substrates, where very good homogeneity of dielectric layers (2%) is achieved. OKS sputtering equipment was specially developed for the pilot plant in order to create a viable alternative to existing PECVD and opportunities for a wider use of the system, especially for the formation of multilayer dielectric films suitable for colored solar cells. (en)
Title	Comparison of Aluminum Oxide Layers Deposited by PECVD and Pulsed Magnetron Sputtering for Dielectric Rear Side Passivation of Crystalline Silicon Solar Cells Comparison of Aluminum Oxide Layers Deposited by PECVD and Pulsed Magnetron Sputtering for Dielectric Rear Side Passivation of Crystalline Silicon Solar Cells (en)
skos:prefLabel	Comparison of Aluminum Oxide Layers Deposited by PECVD and Pulsed Magnetron Sputtering for Dielectric Rear Side Passivation of Crystalline Silicon Solar Cells Comparison of Aluminum Oxide Layers Deposited by PECVD and Pulsed Magnetron Sputtering for Dielectric Rear Side Passivation of Crystalline Silicon Solar Cells (en)
skos:notation	RIV/00216305:26220/13:PU106742!RIV14-MSM-26220___
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(ED2.1.00/03.0072), P(FR-TI1/603)
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Hégr, Ondřej
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta elektrotechniky a komunikačních technologií
http://linked.open...dnocenehoVysledku	66137
http://linked.open...ai/riv/idVysledku	RIV/00216305:26220/13:PU106742
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	solar cells, dielectric, passivation layer, aluminum oxide, reactive sputtering, PECVD (en)
http://linked.open.../riv/klicoveSlovo	reactive sputtering PECVD solar cells passivation layer dielectric aluminum oxide
http://linked.open...ontrolniKodProRIV	[07A5C065BAA2]
http://linked.open...v/mistoKonaniAkce	Paris
http://linked.open...i/riv/mistoVydani	München, Germany
http://linked.open...i/riv/nazevZdroje	Proceedings of 28th European Photovoltaic Solar Energy Conference and Exhibition
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Centre of sensor, information and communication systems Effective coating technology of thin passivation and antireflection layers for production of crystalline solar cells
http://linked.open...UplatneniVysledku	2013
http://linked.open...iv/tvurceVysledku	Bařinka, Radim Sobota, Jaroslav Čech, Pavel Kadlec, Stanislav Hégr, Ondřej Kusko, Martin
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2013-09-30 (xsd:date)
number of pages	3 (xsd:int)
http://bibframe.org/vocab/doi	10.4229/28thEUPVSEC2013-2DV.4.21
http://purl.org/ne...btex#hasPublisher	WIP Wirtschaft und Infrastruktur GmbH & Co Planungs KG
https://schema.org/isbn	3-936338-33-7
http://localhost/t...ganizacniJednotka	26220

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