About: Optimizing Thermal Evaporation Process Compared to Magnetron Sputtering for Fabrication of Titania Quantum Dots

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The titania quantum dots (QDs) are fabricated using template based non-lithographic technique. This technique is comparing to the other known methods (such as e-beam or droplet epitaxy, and lithography), cheaper, faster, and well reproducible. Nanoporous template employed in this method is created from aluminum layer. The material in the following step for creating QDs is titanium film located under the aluminum film. These films are prepared using physical vapor deposition (PVD) processes. Electrochemical properties and behavioral of these layers are key parameters for fabrication of QDs. During PVD deposition, it is very important to optimize every parameter of deposition process due to following creation of QDs. In the presented paper the comparison of two deposition methods is proposed and the deposition parameters influence on the nanofabrication of QDs is shown. In the beginning, there is the optimization of the thermal evaporation. The PVD thermal evaporation process is used due the ability of The titania quantum dots (QDs) are fabricated using template based non-lithographic technique. This technique is comparing to the other known methods (such as e-beam or droplet epitaxy, and lithography), cheaper, faster, and well reproducible. Nanoporous template employed in this method is created from aluminum layer. The material in the following step for creating QDs is titanium film located under the aluminum film. These films are prepared using physical vapor deposition (PVD) processes. Electrochemical properties and behavioral of these layers are key parameters for fabrication of QDs. During PVD deposition, it is very important to optimize every parameter of deposition process due to following creation of QDs. In the presented paper the comparison of two deposition methods is proposed and the deposition parameters influence on the nanofabrication of QDs is shown. In the beginning, there is the optimization of the thermal evaporation. The PVD thermal evaporation process is used due the ability of (en)
Title	Optimizing Thermal Evaporation Process Compared to Magnetron Sputtering for Fabrication of Titania Quantum Dots Optimizing Thermal Evaporation Process Compared to Magnetron Sputtering for Fabrication of Titania Quantum Dots (en)
skos:prefLabel	Optimizing Thermal Evaporation Process Compared to Magnetron Sputtering for Fabrication of Titania Quantum Dots Optimizing Thermal Evaporation Process Compared to Magnetron Sputtering for Fabrication of Titania Quantum Dots (en)
skos:notation	RIV/00216305:26220/13:PU105916!RIV14-GA0-26220___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(GAP102/11/1068)
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Chomoucká, Jana Pekárek, Jan Drbohlavová, Jana Hubálek, Jaromír Svatoš, Vojtěch Márik, Marian
http://linked.open.../riv/druhVysledku	O - Ostatní výsledky nezařaditelné do žádného z výše uvedených druhů výsledku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta elektrotechniky a komunikačních technologií
http://linked.open...dnocenehoVysledku	94528
http://linked.open...ai/riv/idVysledku	RIV/00216305:26220/13:PU105916
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	titania quantum dots, anodization, magnetron sputtering, thermal evaporation. (en)
http://linked.open.../riv/klicoveSlovo	thermal evaporation. titania quantum dots magnetron sputtering anodization
http://linked.open...ontrolniKodProRIV	[5E4295C600C2]
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Nano-Electro-Bio-Tools for Biochemical and Molecularly-Biological Studies of Eukaryotic Cells (NanoBioTECell)
http://linked.open...UplatneniVysledku	2013
http://linked.open...iv/tvurceVysledku	Chomoucká, Jana Drbohlavová, Jana Hubálek, Jaromír Pekárek, Jan Márik, Marian Svatoš, Vojtěch
http://localhost/t...ganizacniJednotka	26220

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