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  • This paper reports on design and fabrication of the low power MEMS heating membrane - micromachined hotplates. This type of device is very often used for gas-sensing applications. The aim of this work is to produce heating membrane with the power consumption below 100 mW at the operating temperature 480 C. The sample which is going to be produced will be the membrane with size of 1x1 mm, to ascertain the applicable process of the fabrication technology and the applicable design of the micro-hotplate.
  • This paper reports on design and fabrication of the low power MEMS heating membrane - micromachined hotplates. This type of device is very often used for gas-sensing applications. The aim of this work is to produce heating membrane with the power consumption below 100 mW at the operating temperature 480 C. The sample which is going to be produced will be the membrane with size of 1x1 mm, to ascertain the applicable process of the fabrication technology and the applicable design of the micro-hotplate. (en)
Title
  • Low power MEMS heating membrane
  • Low power MEMS heating membrane (en)
skos:prefLabel
  • Low power MEMS heating membrane
  • Low power MEMS heating membrane (en)
skos:notation
  • RIV/00216305:26220/12:PU99549!RIV13-MSM-26220___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(ED1.1.00/02.0068), P(EE2.3.20.0027)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 147503
http://linked.open...ai/riv/idVysledku
  • RIV/00216305:26220/12:PU99549
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • MEMS (microelectromechanical system), micro-hotplate, power consumption, micromachining. (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [596A0F837729]
http://linked.open...v/mistoKonaniAkce
  • Brno
http://linked.open...i/riv/mistoVydani
  • Brno
http://linked.open...i/riv/nazevZdroje
  • EDS 12 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Chomoucká, Jana
  • Hubálek, Jaromír
  • Hrdý, Radim
  • Pekárek, Jan
  • Márik, Marian
  • Svatoš, Vojtěch
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
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  • Vysoké učení technické v Brně
https://schema.org/isbn
  • 978-80-214-4539-0
http://localhost/t...ganizacniJednotka
  • 26220
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