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  • This paper describes the theoretical analysis of ion sputtering of multicomponent targets on the basis of (SiC)1-x(AlN)x. The features of ion sputtering are studied.They are connected with consideration necessity of sputtering ratio of multicomponent materials and it changes with the increasing of ion influence dose. Moreover, the effect of low metal concentrations in silicon carbide on th sputtering velocity and layer formation is also taken into account.
  • This paper describes the theoretical analysis of ion sputtering of multicomponent targets on the basis of (SiC)1-x(AlN)x. The features of ion sputtering are studied.They are connected with consideration necessity of sputtering ratio of multicomponent materials and it changes with the increasing of ion influence dose. Moreover, the effect of low metal concentrations in silicon carbide on th sputtering velocity and layer formation is also taken into account. (en)
Title
  • Investigation of the ion sputtering process of the (SiC)1-x(AlN)x ceramic target
  • Investigation of the ion sputtering process of the (SiC)1-x(AlN)x ceramic target (en)
skos:prefLabel
  • Investigation of the ion sputtering process of the (SiC)1-x(AlN)x ceramic target
  • Investigation of the ion sputtering process of the (SiC)1-x(AlN)x ceramic target (en)
skos:notation
  • RIV/00216305:26220/12:PU99134!RIV13-GA0-26220___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(ED2.1.00/03.0072), P(GAP102/11/0995)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
  • Dallaeva, Dinara
http://linked.open.../riv/druhVysledku
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  • 142938
http://linked.open...ai/riv/idVysledku
  • RIV/00216305:26220/12:PU99134
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • ion-plasma sputtering, sputtering velocity, growth rate, ion energy (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [36DD2FA4AC8B]
http://linked.open...v/mistoKonaniAkce
  • Brno
http://linked.open...i/riv/mistoVydani
  • LITERA, Tabor 43a, 61200 Brno
http://linked.open...i/riv/nazevZdroje
  • IMAPS CS International Conference. Electronic Devices and Systems. EDS'12. Proceedings.
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http://linked.open...UplatneniVysledku
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  • Tománek, Pavel
  • Bilalov, Bilal
  • Dallaeva, Dinara
  • Safaraliev, Gadjimet
  • Arkhipov, Alexandr
  • Kardashova, Gulnara
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
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  • Vysoke uceni technicke v Brne
https://schema.org/isbn
  • 978-80-214-4539-0
http://localhost/t...ganizacniJednotka
  • 26220
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