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  • The aim of this work is design and fabrication of micro hotplates. This type of device is often used for gas-sensing applications. The main goal is to produce the structure of the heating membrane. Two types of membranes are discussed – suspended and close type of the membrane. The sample which is going to be produced will be a membrane with the size of 1 mm2, to ensure a suitable fabrication technology and the applicable design of the micro-hotplate. The micro hotplates power consumption has to be up to 100 mW at the operating temperature 480 C.
  • The aim of this work is design and fabrication of micro hotplates. This type of device is often used for gas-sensing applications. The main goal is to produce the structure of the heating membrane. Two types of membranes are discussed – suspended and close type of the membrane. The sample which is going to be produced will be a membrane with the size of 1 mm2, to ensure a suitable fabrication technology and the applicable design of the micro-hotplate. The micro hotplates power consumption has to be up to 100 mW at the operating temperature 480 C. (en)
Title
  • Design and fabrication of MEMS low power heating membrane
  • Design and fabrication of MEMS low power heating membrane (en)
skos:prefLabel
  • Design and fabrication of MEMS low power heating membrane
  • Design and fabrication of MEMS low power heating membrane (en)
skos:notation
  • RIV/00216305:26220/12:PU98796!RIV13-GA0-26220___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(ED2.1.00/03.0072), P(GA102/08/1546)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 130247
http://linked.open...ai/riv/idVysledku
  • RIV/00216305:26220/12:PU98796
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • microhotplate, gas sensor, membrane (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [1DE74CC3D429]
http://linked.open...v/mistoKonaniAkce
  • Brno
http://linked.open...i/riv/mistoVydani
  • Brno
http://linked.open...i/riv/nazevZdroje
  • XII. Pracovní setkání fyzikálních chemiků a elektrochemiků
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Chomoucká, Jana
  • Hubálek, Jaromír
  • Hrdý, Radim
  • Pekárek, Jan
  • Márik, Marian
  • Svatoš, Vojtěch
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
http://purl.org/ne...btex#hasPublisher
  • Mendelova zemědělská a lesnická univerzita v Brně
https://schema.org/isbn
  • 978-80-7375-618-5
http://localhost/t...ganizacniJednotka
  • 26220
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