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rdf:type
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Description
| - The aim of this work is design and fabrication of micro hotplates. This type of device is often used for gas-sensing applications. The main goal is to produce the structure of the heating membrane. Two types of membranes are discussed – suspended and close type of the membrane. The sample which is going to be produced will be a membrane with the size of 1 mm2, to ensure a suitable fabrication technology and the applicable design of the micro-hotplate. The micro hotplates power consumption has to be up to 100 mW at the operating temperature 480 C.
- The aim of this work is design and fabrication of micro hotplates. This type of device is often used for gas-sensing applications. The main goal is to produce the structure of the heating membrane. Two types of membranes are discussed – suspended and close type of the membrane. The sample which is going to be produced will be a membrane with the size of 1 mm2, to ensure a suitable fabrication technology and the applicable design of the micro-hotplate. The micro hotplates power consumption has to be up to 100 mW at the operating temperature 480 C. (en)
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Title
| - Design and fabrication of MEMS low power heating membrane
- Design and fabrication of MEMS low power heating membrane (en)
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skos:prefLabel
| - Design and fabrication of MEMS low power heating membrane
- Design and fabrication of MEMS low power heating membrane (en)
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skos:notation
| - RIV/00216305:26220/12:PU98796!RIV13-GA0-26220___
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(ED2.1.00/03.0072), P(GA102/08/1546)
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/00216305:26220/12:PU98796
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - microhotplate, gas sensor, membrane (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...v/mistoKonaniAkce
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http://linked.open...i/riv/mistoVydani
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http://linked.open...i/riv/nazevZdroje
| - XII. Pracovní setkání fyzikálních chemiků a elektrochemiků
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Chomoucká, Jana
- Hubálek, Jaromír
- Hrdý, Radim
- Pekárek, Jan
- Márik, Marian
- Svatoš, Vojtěch
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http://linked.open...vavai/riv/typAkce
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http://linked.open.../riv/zahajeniAkce
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number of pages
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http://purl.org/ne...btex#hasPublisher
| - Mendelova zemědělská a lesnická univerzita v Brně
|
https://schema.org/isbn
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http://localhost/t...ganizacniJednotka
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