About: Nanostructured anodic-alumina-based dielectrics for high-frequency integral capacitors     Goto   Sponge   NotDistinct   Permalink

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Description
  • Three types of thin solid films with the nanoscale inner structures were synthesized by sputtering-deposition and anodizing of Al layer, Al-Si alloy layer, and Al/Ta bilayer on Si wafers. All the anodic films comprised nanoporous alumina layer as the key component. The essential differences were due to the silicon impurities (AlSi alloy) and the array of nanosized tantalum oxide protrusions in the alumina barrier layer (Al/Ta bilayer). The films were examined by scanning and transmission electron microscopy and electrochemical impedance spectroscopy. Integral capacitors utilizing the anodic films as dielectrics combine the small-value capacitance (6.5 nF cm-2) with the excellent properties of high withstand field strength, low leakage current, and low loss tangent. The revealed dispersion of dielectric constant, and the presence of loss peaks on the temperature and frequency dependencies of losses denote the influence of ion-relaxation mechanism on dielectrics polarizability, with the characteristic t
  • Three types of thin solid films with the nanoscale inner structures were synthesized by sputtering-deposition and anodizing of Al layer, Al-Si alloy layer, and Al/Ta bilayer on Si wafers. All the anodic films comprised nanoporous alumina layer as the key component. The essential differences were due to the silicon impurities (AlSi alloy) and the array of nanosized tantalum oxide protrusions in the alumina barrier layer (Al/Ta bilayer). The films were examined by scanning and transmission electron microscopy and electrochemical impedance spectroscopy. Integral capacitors utilizing the anodic films as dielectrics combine the small-value capacitance (6.5 nF cm-2) with the excellent properties of high withstand field strength, low leakage current, and low loss tangent. The revealed dispersion of dielectric constant, and the presence of loss peaks on the temperature and frequency dependencies of losses denote the influence of ion-relaxation mechanism on dielectrics polarizability, with the characteristic t (en)
Title
  • Nanostructured anodic-alumina-based dielectrics for high-frequency integral capacitors
  • Nanostructured anodic-alumina-based dielectrics for high-frequency integral capacitors (en)
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  • Nanostructured anodic-alumina-based dielectrics for high-frequency integral capacitors
  • Nanostructured anodic-alumina-based dielectrics for high-frequency integral capacitors (en)
skos:notation
  • RIV/00216305:26220/12:PU101609!RIV13-MSM-26220___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • R
http://linked.open...iv/cisloPeriodika
  • -
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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http://linked.open...dnocenehoVysledku
  • 152968
http://linked.open...ai/riv/idVysledku
  • RIV/00216305:26220/12:PU101609
http://linked.open...riv/jazykVysledku
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  • porous alumina, tantalum oxide, nanostructure, dielectric properties, electric polarization, integral capacitors, high-frequency performance (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [C63648326639]
http://linked.open...i/riv/nazevZdroje
  • Thin Solid Films
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
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http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • -
http://linked.open...iv/tvurceVysledku
  • Hubálek, Jaromír
  • Mozalev, Alexander
  • Habazaki, Hiroki
  • Sakairi, Masatoshi
  • Takahashi, Hideaki
issn
  • 0040-6090
number of pages
http://localhost/t...ganizacniJednotka
  • 26220
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