About: A new tool for the post-process modification of chips by nanostructures for chemical sensing

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About: A new tool for the post-process modification of chips by nanostructures for chemical sensing Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The tool is built up on moving plates driven by step-motors for precise location of sensors chip on the wafer to perform post-processing of the chip. The tool can make chemical or electrochemical deposition and etching for the chip modification after wafer processing. Each chip on the wafer can be modified with different process. The deposition from solutions and wet etching is controlled by a flow-system and power source if it is necessary. Techniques for ordered nanostructures creation using the tool were also developed. The tool helps to improve properties of microsensors fabricated on the chip by thin-film and semiconductor technology. The tool is built up on moving plates driven by step-motors for precise location of sensors chip on the wafer to perform post-processing of the chip. The tool can make chemical or electrochemical deposition and etching for the chip modification after wafer processing. Each chip on the wafer can be modified with different process. The deposition from solutions and wet etching is controlled by a flow-system and power source if it is necessary. Techniques for ordered nanostructures creation using the tool were also developed. The tool helps to improve properties of microsensors fabricated on the chip by thin-film and semiconductor technology. (en)
Title	A new tool for the post-process modification of chips by nanostructures for chemical sensing A new tool for the post-process modification of chips by nanostructures for chemical sensing (en)
skos:prefLabel	A new tool for the post-process modification of chips by nanostructures for chemical sensing A new tool for the post-process modification of chips by nanostructures for chemical sensing (en)
skos:notation	RIV/00216305:26220/09:PU84190!RIV10-MSM-26220___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(1QS201710508), Z(MSM0021630503)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Hrdý, Radim Hubálek, Jaromír Vorozhtsova, Marina
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Vysoké učení technické v Brně / Fakulta elektrotechniky a komunikačních technologií
http://linked.open...dnocenehoVysledku	301427
http://linked.open...ai/riv/idVysledku	RIV/00216305:26220/09:PU84190
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	chemical sensors, nanostructured electrodes, electrochemical deposition, etching (en)
http://linked.open.../riv/klicoveSlovo	etching chemical sensors nanostructured electrodes electrochemical deposition
http://linked.open...odStatuVydavatele	CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV	[CF8726C1F731]
http://linked.open...i/riv/nazevZdroje	Eurosensors XXIII: Sensors, Actuators and Micro/Nanosystems
http://linked.open...in/vavai/riv/obor	JB
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...vavai/riv/projekt	Impedimetric chemical microsensors with nanomachined surface of electrodes
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	2009
http://linked.open...iv/tvurceVysledku	Hubálek, Jaromír Hrdý, Radim Vorozhtsova, Marina
http://linked.open...n/vavai/riv/zamer	Nové trendy v mikroelektronických systémech a nanotechnologiích (MIKROSYN)
issn	1876-6196
number of pages	4 (xsd:int)
http://localhost/t...ganizacniJednotka	26220

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