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Description
  • This paper covers precise monitoring system for monolithic tungsten wire manufacture. This device is designed in order to analyze and control optimal cathode etching process. Main function of this control unit is to control position system, measure etching current and temperature and control cathode etching process.
  • This paper covers precise monitoring system for monolithic tungsten wire manufacture. This device is designed in order to analyze and control optimal cathode etching process. Main function of this control unit is to control position system, measure etching current and temperature and control cathode etching process. (en)
  • This paper covers precise monitoring system for monolithic tungsten wire manufacture. This device is designed in order to analyze and control optimal cathode etching process. Main function of this control unit is to control position system, measure etching current and temperature and control cathode etching process. (cs)
Title
  • Precise process monitoring system for anisotropic etching
  • Precise process monitoring system for anisotropic etching (en)
  • Precizní monitorovací systém pro anisotropní leptání (cs)
skos:prefLabel
  • Precise process monitoring system for anisotropic etching
  • Precise process monitoring system for anisotropic etching (en)
  • Precizní monitorovací systém pro anisotropní leptání (cs)
skos:notation
  • RIV/00216305:26220/05:PU54673!RIV06-MSM-26220___
http://linked.open.../vavai/riv/strany
  • 152-154
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM0021630503)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 537712
http://linked.open...ai/riv/idVysledku
  • RIV/00216305:26220/05:PU54673
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Precise monitoring system, monolithic tungsten wire, industrial process. (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [98A28A10DEEA]
http://linked.open...v/mistoKonaniAkce
  • Chania, Crete, Greece
http://linked.open...i/riv/mistoVydani
  • Greece
http://linked.open...i/riv/nazevZdroje
  • Socrates Workshop Intensive Training Programme in Electronic Systeme Design Proceedings.
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Kadlec, Jaroslav
  • Kolařík, Vladimír
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Technological Institute of Chania
https://schema.org/isbn
  • 80-214-3042-7
http://localhost/t...ganizacniJednotka
  • 26220
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